PFEIFFER PRISMAPLUS QMG 220 (01) PDF Document

The PFEIFFER PRISMAPLUS QMG 220 mass spectrometer is designed for partial pressure analysis at pressures <10^-4 mbar. Typical applications are measurement, monitoring, and process control functions in vacuum systems.

The PrismaPlus is not intended to produce measurement results on which the safety of persons or large assets depend. For such applications, the safety must be ensured by additional measures.

All work described in the operating instructions may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

Adhere to the applicable regulations and take the necessary precautions for the process media used.

Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

The mass spectrometer system comprises the following components:

Analyzer QMA 200 (contains ion source, mass filter, and Faraday detector/C-SEM)

Electric unit QME 220

Input/output module IO 220 (optional)

Power supply SP 220

PC with Quadera software

Link to PC (Ethernet)

Mains connection

Connections for Vacuum gauge

The front panel elements provide connections and status indicators for the PFEIFFER PRISMAPLUS QMG 220.

Front panel element	Description
Connectors < 24 V= >	Connector for QME 220-power supply SP 220 (1). An additional connector on the IO 220 is for a second power supply SP 220 (2) for vacuum gauges with high power consumption.
LED < 24 V= >	Indicator: 24 V o.k.
LED < RUN >	Indicator: QME 220 firmware running.
LED < EMISS >	Indicator: Emission on.
Connector < LAN >	Ethernet connection (PC).
Connector < USB >	USB connection (only for service purposes).
Connector < I/O >	Interconnection to IO 220 EXT_PROT input.
Connector < TP GAUGE >	Vacuum gauge connector (analog).
Connector < ANALOG I/O >	Analog inputs / outputs.
Connector < DIGITAL I/O >	Digital inputs / outputs.
Connector < SERIAL >	Vacuum gauge connector (digital).

General Data

Detector type	Faraday
Unit resolution (valley, entire mass range) at 10 % peak height adjustable to	<10 % / 0.5 … 2.5 u
Max. operating pressure	1×10-4 mbar
Reproducibility of the peak ratio (constant conditions during 8 h, N₂ and Ar from air)	±0.5 %
QMA 200 operating temperature	0 … +150 °C
Bakeout temperature (QME 220 removed)	max. +200 °C
Weight	2.4 kg (2.7 with 90° connection)
Connection flange	DN 40 CF

HS ion source (High sensitivity- ion source)

Design principle, field of application	open design, radial symmetrical, suitable for residual gas analysis, 2 filaments (yttriated iridium or tungsten), degassing by electron bombardment (10 mA, 300 V)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Minimum detectable partial pressure	<1×10-12 mbar	<2×10-12 mbar	<4×10-12 mbar
Sensitivity for argon	>1×10-3 A/mbar	>6×10-4 A/mbar	>3×10-4 A/mbar
Contribution to neighboring mass (40/41)	<10 ppm	<20 ppm	<50 ppm

Closed HS ion source

Design principle, field of application	closed design, suitable for quantitative gas analysis, effective suppression of residual gas components, 2 filaments (yttriated iridium or tungsten)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Conductance	1 l/s	1 l/s	1 l/s
Minimum detectable partial pressure	10 ppm	20 ppm	50 ppm
Contribution to neighboring mass (40/41)	<10 ppm	<20 ppm	<50 ppm

Cross-Beam ion source

Design principle, field of application	open design, suitable for molecular beam experiments, 2 filaments (yttriated iridium or tungsten), degassing by electron bombardment (10 mA, 300 V)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Minimum detectable partial pressure	3×10-11 mbar	6×10-11 mbar	1.2×10-10 mbar
Sensitivity	4×10-5 A/mbar	2×10-5 A/mbar	1×10-5 A/mbar
Contribution to neighboring mass (40/41)	<10 ppm	<20 ppm	<50 ppm

Grid ion source

Design principle, field of application	open design, suitable for residual gas analysis in the UHV range, 2 filaments (tungsten), degassing by electron bombardment (10 mA, 300 V)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Minimum detectable partial pressure	5×10-12 mbar	2×10-12 mbar	1×10-12 mbar
Sensitivity	2×10-4 A/mbar	1×10-4 A/mbar	5×10-5 A/mbar
Contribution to neighboring mass (40/41)	<50 ppm	<100 ppm	<200 ppm

General Data

Detector type	C-SEM / Faraday
Unit resolution (valley, entire mass range) at 10 % peak height adjustable to	<10 % / 0.5 … 2.5 u
Max. operating pressure	1×10-4 mbar
Reproducibility of the peak ratio (constant conditions during 8 h, N₂ and Ar from air)	±0.5 %
QMA 200 operating temperature	0 … +150 °C
Bakeout temperature (QME 220 removed)	max. +200 °C
Weight	3.8 kg (4.1 with 90° connection)
Connection flange	DN 40 CF

HS ion source (High sensitivity- ion source)

Design principle, field of application	open design, radial symmetrical, suitable for residual gas analysis, 2 filaments (yttriated iridium or tungsten), degassing by electron bombardment (10 mA, 300 V)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Minimum detectable partial pressure	1×10-14 / 5×10-12 mbar	1×10-14 / 3×10-12 mbar	2×10-14 / 1.5×10-12 mbar
Sensitivity for argon	>200 / >5×10-4 A/mbar	>200 / >3×10-4 A/mbar	>100 / >1.5×10-4 A/mbar
Contribution to neighboring mass (40/41)	<10 ppm	<20 ppm	<50 ppm

Closed HS ion source

Design principle, field of application	closed design, suitable for quantitative gas analysis, effective suppression of residual gas components, 2 filaments (yttriated iridium or tungsten)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Conductance	1 l/s	1 l/s	1 l/s
Minimum detectable partial pressure	<1 / 20 ppm	<1 / 40 ppm	<1 / 100 ppm
Contribution to neighboring mass (40/41)	<10 ppm	<20 ppm	<50 ppm

Cross-Beam ion source

Design principle, field of application	open design, suitable for molecular beam experiments, 2 filaments (yttriated iridium or tungsten), degassing by electron bombardment (10 mA, 300 V)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Minimum detectable partial pressure	3×10-13 / 5×10-11 mbar	6×10-13 / 1×10-12 mbar	1.2×10-12 / 2.5×10-12 mbar
Sensitivity	100 / 2×10-5 A/mbar	100 / 1×10-5 A/mbar	50 / 7×10-6 A/mbar
Contribution to neighboring mass (40/41)	<10 ppm	<20 ppm	<50 ppm

Grid ion source

Design principle, field of application	open design, suitable for residual gas analysis in the UHV range, 2 filaments (tungsten), degassing by electron bombardment (10 mA, 300 V)
Mass range	1 … 100 u	1 … 200 u	1 … 300 u
Minimum detectable partial pressure	1×10-13 / 1×10-11 mbar	2×10-13 / 2×10-11 mbar	4×10-13 / 4×10-11 mbar
Sensitivity	200 / 1×10-4 A/mbar	200 / 5×10-5 A/mbar	100 / 3×10-5 A/mbar
Contribution to neighboring mass (40/41)	<50 ppm	<100 ppm	<200 ppm

Measuring system
Measurement channels	128
Measurement modes	Scan analog, Scan Bargraph, MID
Measurement cycles	mono- / multichannel 1 … 9999 cycles or repeat
MID-dwell	2 ms … 60 s
Measurement speed scan analog + bargraph peak	20 ms/u … 60 s/u
Measurement speed scan bargraph stair	2 ms/u … 60 s/u
Electrometer amplifier	1×10-5 … 1×10-12 A (f.s.), fix and autorange
Signal filter	FIR filter
Power supply	24 VDC / 2.0 A, SP 220
Interfaces
Operation, control	Ethernet
Extension	input/output module IO 220
EXTERNAL_PROTECTION	floating contact
Inputs/outputs
Analog	via IO 220
Digital	via IO 220
Weight	1.9 kg (2.2 kg with 90° connection)

The EXTERNAL_PROTECTION (EXT_PROT) is a control function available on the optional IO 220 module. Its behavior depends on the selected mode and the state of the EXT_PROT input.

EXT_PROT-Mode	Input EXT_PROT	Function
INTERN-OFF	not relevant	FIL and SEM can be switched on and off (manually, no external protection).
EXTERN-ON-OFF	+24 V	FIL and C-SEM on.
	0 V (open)	FIL and C-SEM off.
EXTERN-OFF	+24 V	FIL and SEM can be switched on and off (manually).
	0 V (open)	FIL and C-SEM off. To switch on again, the input EXT_PROT has to be connected to +24 V, after that FIL and C-SEM can be operated manually again.

Operation	only inside rooms
Altitude	max. 2000 m NN
Protection category	IP 30
Pollution degree	2
Temperatures
Storage/transport	-25 … +70 °C
Operation	0 … +40 °C
Relative humidity	max. 80% up to 31 °C, linearly decreasing to 50% at 40 °C

DANGER: Putting a product which presents visible damage into operation can be extremely hazardous. If the product presents visible damage do not put it into operation and make sure it is not inadvertently put into operation.

DANGER: Voltages up to 330 VDC appear on the QMA 200 during operation. Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed to this voltage. If such parts become hazardous, they must be arranged or protected so that no arcing and charge transfer can occur. If the QMA 200 can be touched while the vacuum system is open, additional protection is needed, such as mechanical protection against touching and forced disconnection of the SP 220 power supply when the system is opened.

DANGER: No external hazardous voltages are allowed to be transferred to the electrodes of the QMA 200. If such danger sources exist in the vacuum chamber, additional safety measures (e.g. better placement, shielding, grounding, etc.) must be taken to preclude such influences.

WARNING: The QMA 200 must be correctly installed from a vacuum engineering point of view, i.e. the gases to be detected must have unhindered access to the analyzer. Vacuum coating of the analyzer must be prevented.

NOTE: Make sure you adhere to the special requirements concerning cleanliness and damage prevention when working with vacuum components.

Hexagon socket screw key, AF 4

Torx screw driver T10

Open-end wrench (2 pieces), AF 10

DANGER: The analyzer flange must be properly grounded.

Grounding can be achieved by connecting with all 6 screws to the properly grounded vacuum system.

If the mounting flange is not grounded, the QMA 200 flange (grounding screw M4) must be connected to the protective ground by means of a separate ground conductor. Use a yellow/green insulated or bare stranded copper wire with a cross-section of:

2.5 mm² if mechanically protected

4.0 mm² if unprotected

NOTE: Installation Orientation

The QMA 200 should preferably be mounted horizontally (with the guiding groove downward). This results in optimum protection of the QME 220 against falling objects and provides easy installation and excellent access to the front panel.

On the QMG 220 with 90° connection this results in a vertically suspended arrangement of the QME 220.

Step 1. Set the QMA 200 into the supplied mounting tool.

Step 2. Carefully remove the transport cover on the QMA 200 and save it for possible future use.

Step 3. Carefully pull off the transport brace and save it for possible future use.

Step 4. Flange the analyzer to the vacuum chamber.

DANGER: The QME 220 may be mounted only to a correctly installed QMA 200 as the only ground connection is via the QMA 200 flange. The 24 V supply line from the SP 220 must never be connected if QMA 200 is not screw fastened to the QME 220.

Step 1. With a hexagon-socket-screw key (AF 4), loosen the two screws on the black plastic connection piece of the QME 220 so that the moving part has a play of 2 … 3 mm.

Step 2. Carefully slide the QME 220 onto the mounted QMA 200 up to the notch mark. Make sure the positioning on the QME 220 through the grounding tab and the guide groove in the QMA 200 is correct. Do not apply excessive force.

Step 3. Firmly tighten the two hexagon-socket-head screws. These screws secure the QME 220 mechanically and ensure electrical safety by providing ground contact.

Required tools: Screwdriver Torx T10

Required Material: I/O module IO 220

Step 1. Disconnect the power supply from the mains and remove all electrical connections to the QME 220.

Step 2. Remove the QME 220 from the analyzer by following the QME 220 installation procedure in reverse order.

Step 3. Place the QME 220 on a stable base in order to be able to work on the front panel.

Step 4. Loosen and remove the three screws on the front panel.

Step 5. Remove the three transport nuts at the back of the IO 220.

Step 6. Carefully place the IO 220 module onto the front panel of the QME 220. Use both hands and make sure the D-Sub connection between IO 220 and QME 220 is engaged correctly.

Step 7. Fasten the three M3x40 mm Torx screws delivered with the IO 220.

Step 8. Re-install the extended QME 220 following the procedure described above, and continue with electrical connections.

Step 1. Disconnect the power supply from the mains and remove all electrical connections to the QME 220.

Step 2. Remove the QME 220 from the analyzer by following the procedure described in ‘QME 220 Installation’ in reverse order.

Step 3. Place the QME 220 on a stable base in order to be able to work on the front panel.

Step 4. Loosen and remove the three screws as shown in the manual.

Step 5. Carefully pull off the IO 220 module from the QME 220 front panel using both hands.

Step 6. Secure the three screws in the IO 220 with the M3 transport nuts.

Step 7. Insert and fasten the short Torx screws.

Step 8. Re-install the QME 220 following the procedure described above and continue with ‘Electrical Connections’.

WARNING: Do not connect the mains cable of the SP 220 to the mains socket yet.

Step 1. Set up the power supply in such a way that:

– it cannot get wet e.g. by spilled water on the floor,

– air circulation is not impeded and the ambient conditions are satisfied.

Step 2. Insert the outlet connector of the SP 220 into the 24 VDC connector of the QME 220.

For reasons of electromagnetic compatibility (EMI), a single central grounding point is strongly recommended for all connected units (pumping station, SP 220, computer, etc.). A multiple AC power outlet or a common line voltage distributor with a power switch fulfills this requirement.

There are two ways to connect the QME 220 to a PC:

Direct Link: For a direct link between a QME 220 and a PC, use the 8-core, crossed patch cable supplied (red, length 3 m, RJ45 connectors on both sides).

Network/Switch Connection: For an interconnection via a switch or in a network situation, use the straight (1:1) patch cable (gray, length 3 m, RJ45 connectors on both sides, also supplied with the QME 220).

The interface status is indicated by two LEDs integrated in the RJ45 connector:

LED	Status	Meaning
green	lit	data transfer rate 100 Mbit/s
	dark	data transfer rate 10 Mbit/s
yellow	lit (flickering)	data transfer in progress
	dark	no data transfer (or no connection)

The following vacuum gauges can be connected to the system, provided the optional IO 220 is installed:

Gauge type	Interface	Connector	Degas	Power supply
PKR251/261	analog	X5, <TP GAUGE>, 6 pin	no	internal
PBR260	analog	X5, <TP GAUGE>, 6 pin	yes	SP 220
TPR280/281	analog	X5, <TP GAUGE>, 6 pin	no	internal
HPT 100/200	RS485	X1, <SERIAL>, 9 pin	yes	SP 220
PPT 100/200	RS485	X1, <SERIAL>, 9 pin	no	internal
RPT 100/200	RS485	X1, <SERIAL>, 9 pin	no	internal

Operation of gauges marked with SP 220 requires an additional type SP 220 power supply.

Analog gauges (TPR and PKR compact gauges) connect to X5, <TP GAUGE>.

Digital gauges (HPT-, PPT- and RPT gauges) connect to X1, <SERIAL>.

Use cables and connectors listed in the gauges manual exclusively.

The type of gauge connected to the QME 220 is automatically identified by the QME 220 after the power on sequence. After a change of gauges, the 24 VDC power supply of the QME 220 has to be disconnected from the mains. After 10 seconds it can be reconnected. This procedure forces the QME 220 (SP 220 (1)) to re-identify the actual gauge type connected.

Some gauges have higher supply power requirements that cannot be satisfied by the primary QME 220 power supply (SP 220 (1)). In these cases, a second SP 220 (SP 220 (2)) is required. Connect the second power supply to the dedicated 24V= connector on the IO 220 module. Do not connect the mains cables of both SP 220 supplies to the mains socket until you are ready to power on the system.

Interface Type	Uses
Analog inputs	Reading of measurement values e.g. pressure, temperature, gas flow etc.
Analog outputs	Outputting measurement values e.g. ion currents etc. or calculated values e.g. concentrations etc.
Digital inputs	Software control e.g. triggering measuring sequences etc.
Digital outputs	Controlling switching points e.g. valve control (open/close).

Before the system is started up, check the following:

Mains cable of SP 220 not connected to the mains

Correct installation of all system components and modules

Correct condition of vacuum/process chamber

Correct wiring of system components

LAN link to PC (directly or via network) installed

PC ready for operation

DANGER: Line voltage. Incorrectly grounded products can be extremely hazardous in the event of a fault. The power connector may only be plugged into a socket with a protective ground. The protection must not be nullified by an extension cable without protective ground.

WARNING: Required vacuum conditions. Check the vacuum in the QMA 200 before you insert the power plug of the SP 220.

<10^-4 mbar with Faraday type

<10^-5 mbar with C-SEM type

If you use the compact gauge head connected to the QME 220 (IO 220), the power plug may be inserted without checking the vacuum conditions. Do not turn on the Emission and C-SEM voltage until the above limits have been attained. Activate EXT_PROT monitoring.

WARNING: The QME 220 may only be turned on and off by inserting or detaching the power plug of the SP 220. The 24 VDC connector of the SP 220 must always remain connected to the QME 220.

Step 1. Insert the SP 220 power plugs. NOTE: If a second SP 220 (2) is used for gauges, it has to be switched on first. The <24 V=> lamp at the QME 220 turns on. The QME is ready for operation.

Step 2. After approximately 10 seconds the <RUN> lamp begins to flash at a rate of 2 Hz, indicating that the QME 220’s internal firmware is running.

Step 3. Switch on the PC and start the operation software QUADERA®. The flickering LED at the ethernet connector in the QME 220 (RJ45 connector) indicates data communication in progress. If this LED remains dark, a communication error is suspected. Check cables, components, and PC configuration.

Step 4. Carry out the subsequent steps under QUADERA® software for System configuration, Initial Start Up (Commissioning), and Operation (measuring mode).

CAUTION: Filaments are supplied as preassembled units. They should only be changed by qualified personnel.

The procedure varies slightly depending on the ion source type.

HS Ion Source / Closed HS Ion Source:

Required tools: Open-end wrench AF 10, Flat-nosed pliers, Screwdriver size 0, Special socket wrench AF 3/3.2

1. Detach all electrical connections to the QME 220.

2. Separate the QME 220 from the analyzer.

3. Detach the analyzer from the vacuum chamber.

4. Place the analyzer into the supplied mounting tool.

5. (Closed HS only) Remove the ceramic tube by twisting it clockwise and pulling it off.

6. Grip the U-sections with flat-nose pliers and loosen the 3 screws.

7. Take off the 3 nuts.

8. Carefully pull the filament assembly upward and dispose of it.

9. Remove the replacement filament assembly from its transport box. WARNING: Do not touch the filament, not even with gloved hands.

10. Mount the replacement filament on the ion source. Slide it toward the setscrews so that the plate of the filament assembly is parallel to the plate of the ion source.

11. Mount the 3 nuts on the setscrews and tighten them with the special socket wrench.

12. Grip the U-sections with flat-nose pliers, introduce the electrical connections of the filament laterally at the U-sections and tighten the screws.

13. (Closed HS only) Re-install the ceramic tube.

14. Re-assemble the product in reverse order.

Cross-Beam Ion Source:

1. Follow steps 1-4 from above.

2. Loosen the screws of the filament contacts and remove the U-sections.

3. Loosen and remove the holder nut.

4. Carefully remove the old filament assembly with the ceramic sleeve insulation. Do not remove the rectangular washer.

5. Dispose of the used filament assembly.

6. Open the packing tube and take out the replacement filament assembly. WARNING: Do not touch the filament.

7. Carefully place the new filament assembly on the ion source.

8. Ensure the ceramic sleeve and rectangular washer are seated correctly and fasten the holder nut.

9. Place both U-sections with screws over the connector ends and the supply wires, then fasten the screws.

10. Re-assemble the product in reverse order.

Grid Ion Source:

Required tools: Tweezers, Screwdriver size 0

1. Follow steps 1-4 from above.

2. Loosen and remove the 3 screws holding the filament.

3. Bend the supply wires away slightly.

4. Remove and dispose of the used filament.

5. Open the box of the replacement filament. Carefully take out the new filament using tweezers, holding it at its center connector tab. WARNING: Do not touch the filament.

6. Place the new filament on the filament holder. The holes in the connector tabs must be precisely aligned above the tapholes.

7. Push the supply wire loops over the tapholes.

8. Set the 3 screws in place and tighten carefully.

9. Re-assemble the product in reverse order.

Short circuits and ground faults inside the analyzer can be detected and repaired using an ohmmeter or continuity checker. The following table shows the pin assignment of the 13-pin QMA 200 connector:

Pin No.	Description	Pin No.	Description
1	Reserve	8	RF –
2	Extr	9	GND
3	Focus	10	GND
4	HV –	11	RF +
5	Filament 1	12	Filament Common
6	Filament 2	13	EP
7	Anode

DANGER: Disconnect the 24 V power supply (SP 220) of the QME 220 from the AC power source before any moist cleaning. Make sure the connectors do not get moist.

Housing Cleaning: For cleaning the housing, use only a piece of cloth lightly moistened with water, and possibly some dishwashing detergent. Do not use any aggressive or scouring cleaning agents. Do not operate the unit until it is completely dry.

Filter Mat Replacement:

Step 1. Detach power supplies SP 220 from mains and all electrical connections to the QME 220.

Step 2. Separate the QME 220 from the analyzer.

Step 3. Place the QME 220 on a stable base. If an IO 220 is installed, separate it from QME 220.

Step 4. Loosen the four screws and remove the front panel.

Step 5. Replace the filter mat. Dispose of the old filter mat according to applicable regulations if it is contaminated.

Step 6. Re-assemble the product (steps 1-4 in reverse order).

The RF circuit has to be tuned when the unit is put into service for the first time, when the analyzer is changed (especially from Faraday to C-SEM), or when a corresponding error message is displayed on the screen. An annual tuning check is recommended to ensure optimum measurement accuracy.

Required tool: Screwdriver size 1 … 2, preferably with an isolated tip.

Procedure:

Step 1. Remove the small cap at the side of the QME 220. This hole gives access to the tuning screw.

Step 2. Select the appropriate function in QUADERA® software.

Step 3. Follow the software instructions.

Step 4. Turn the tuning screw ‘TUNE-VOLTAGE’ for voltage minimum. Turn carefully, no force is required. Do not fully tighten the tuning screw and do not turn it out completely.

The ion source sensitivity should be optimized when the unit is put into service for the first time or after a filament change.

Procedure:

Step 1. Select the appropriate function in QUADERA® software.

Step 2. Follow the software instructions.

Step 3. Save settings and data.

If the QME 220 or the QMA 200 needs to be replaced, the procedure is the same as for the initial installation.

Step 1. QME 220 installation.

Step 2. QME 220 connection.

Step 3. Tuning of the RF Generator.

Step 4. Optimizing the ion source sensitivity.

CAUTION: Electronic component. Inappropriate storage (static electricity, humidity etc.) can damage electronic components. Store the product in an antistatic bag or container. Observe the corresponding specifications in the Technical Data for storage temperature and humidity.

DANGER: Contaminated parts. Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING: Substances detrimental to the environment. Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment. Dispose of such substances in accordance with the relevant local regulations.

After disassembling the product, separate its components according to the following criteria:

Contaminated components: Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of.

Other components: Such components must be separated according to their materials and recycled.