ULVAC PFL-22TM (01) PDF MANUAL

ULVAC PFL-22TM (01) PDF SUMMARY:

What should I check upon delivery of the product?

Check first that the delivered product is exactly what was ordered and that there is no break or damage through transport.

What are the ambient conditions for storage, installation, and operation?

• Ambient temperature and humidity for storage: -10°C to 60°C, less than 95%RH
• Ambient temperature and humidity for operation: 10°C to 40°C, less than 95%RH
• Height (for both storage and operation): Lower than 1,000 meters altitude
• External vibration (for both storage and operation): Vibration acceleration less than 114dB (0.5G)
• Miscellaneous (for both storage and operation):
  • There shall be no corrosion behavior or explosive gas.
  • There shall be no freeze or dew formation.
  • There shall be no dust.
  • It shall be in house.
  • Another pump shall not be put on the Pump.
  • The Pump shall not be laid down nor put touching its motor edge face or oil gauge edge face with the ground.
  • There shall be no direct sun beam.
  • Heat source shall be put away from the Pump.

What preparations should I make before using the pump?

1. Remove the tape around the lead-in connection port for cooling water, and protection materials for the inlet port of the baffle and the pumping ports (where the inlet and outlet ports are blocked with protection materials), and then check the pump and the jet for damage.
2. Wipe the flange dry with alcohol etc.
3. Check the presence of the oil before use. Heating without oil may cause a break in a cable of the heater or damage to the boiler.

What should I check regarding oil filling?

Check whether the given oil, ULVOIL D-11, is at the specified level.

How should I make cooling water connections?

Make connections so that the cooling water enters from the cooling water inlet at the upper part of the pump body and then comes out of the cooling water outlet at the upper part of the evacuation pipe. Attach the joints for water piping (nylon tubes etc.) to install the piping. Connect the cooling water in parallel per system. However, if a sufficient flow rate can be obtained within the specified water pressure, even series connection is allowed. Adjust the flow rate of each part as necessary so that the difference in temperature between the inlet and outlet ports of the cooling water is within 10 °C.

What should I do for inlet/outlet port piping?

1. Thoroughly clean the inside of the vacuum chamber, piping, vacuum valves, etc. and then connect to the pump. If it is connected under a dirty condition, the ultimate pressure becomes higher or the time required for the pressure to decrease down to a given pressure becomes longer. Do not touch any part under vacuum by bare hands but wear clean nylon gloves.
2. Remove the gaskets set on the inlet and outlet port flanges, lightly wipe them with a cloth moistened with a solution, such as alcohol to remove dirt on the surface.
3. Do not apply even grease with a low vapor pressure to the gasket surfaces. Only wipe dirt off.
4. Also wipe the gasket grooves on the flange and the corresponding flange surfaces with a clean cloth.
5. Set gaskets in place.
6. Connect the inlet port with the piping using a JIS vacuum flange. For the diameter of the flange opening.

How do I operate the pump after installing it in the evacuation system?

1. Close the valves 1 and 2 and open the valve 3, and then do the pumping with a roughing pump until the pressure inside the diffusion pump reaches 1.3 to 13 Pa (0.01 to 0.1 Torr).
2. Do the pumping until the pressure inside the diffusion pump reaches 1.3 to 13 Pa (0.01 to 0.1 Torr), and then turn on the power to both the main heater and the sub heater. (PFL-22 ™ has no sub heater.)
3. Oil evaporates as its temperature increases and then begins evacuation.
4. After the pump starts to run, close the valve 3, open the valve 2, and do the pumping of the chamber with a roughing pump to 1.3 to 13 Pa (0.01 to 0.1 Torr). After the pumping with the roughing pump, close the valve 2 and open the valves 1 and 3 for evacuation with the diffusion pump. Make sure with the roughing pump that the chamber pressure is reduced down to a sufficiently low level before opening the valve 1.
5. Check the water cooling temperature on the outlet side and, if it is 35 °C or more, increase the flow rate of the cooling water.
6. Approx. 60 minutes after the pump starts, shut off the power to the sub heater to operate the pump with the main heater only. If the sub heater is not shut off and kept running, the oil may evaporate more than necessary and be pumped to the roughing pump side, resulting in a decrease in oil level.

How do I stop the pump operation?

1. Close valve 1. At this time, valve 2 is closed and valve 3 is opened.
2. Turn off the heater switch of the oil diffusion pump.
3. After turning off the heater, oil mist will continue for a while, so do not stop the cooling water. Refer to Table 2 as a guide for pump stop time and cooling water stop time.
4. Close the valve 3 and stop the oil rotary pump after 60 minutes have passed.
5. Return the oil rotary pump to atmospheric pressure by leaking from the vent valve.
6. After turning off the heater switch, stop the cooling water after the cooling water stop time in 60 minutes has passed.
7. If the operation stops and the ambient temperature becomes 5℃ or lower, drain the water in the cooling water system. (Supply compressed air of 0.3MPaG (gauge) from the cooling water inlet port without stopping the cooling water outlet port.) If water is accumulated, it may be frozen and the cooling water pipe may be damaged.