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PDF Content Summary: Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User’s Manual for Communications Settings ZW-8000@ ZW-7000@ ZW-5000@ Z363-E1-06 Introduction Thank you for purchasing the ZW-8000/7000/5000 Series. This manual provides information regarding functions, performance and operating methods that are required for using the ZW-8000/7000/5000 Series. When using the ZW-8000/7000/5000 Series, be sure to observe the following: • The ZW-8000/7000/5000 Series must be operated by personnel knowledgeable in electrical engineer- ing. • To ensure correct use, please read this manual thoroughly to deepen your understanding of the product. • Please keep this manual in a safe place so that it can be referred to whenever necessary. Terms and Conditions Agreement (Please Read) Overview of Communication Specifica- User’s Manual for tions Communications Settings Parallel I/O Connection EtherCAT Connection EtherNet/IP Connection No-protocol Connection Sensor Controller Operations Troubleshooting Confocal Fiber Type Displacement Sensor ZW-8000/7000/5000 Series Appendices 12345678 Terms and Conditions Agreement Read and understand this Manual Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or comments. Warranties • Exclusive Warranty Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron disclaims all other warranties, express or implied. • Limitations OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT NON- INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the Products or otherwise of any intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at Omron’s election, to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty, repair, indemnity or any other claims or expenses regarding the Products unless Omron’s analysis confirms that the Products were properly handled, stored, installed and maintained and not subject to contamination, abuse, misuse or inappropriate modification. Return of any Products by Buyer must be approved in writing by Omron before shipment. Omron Companies shall not be liable for the suitability or unsuitability or the results from the use of Products in combination with any electrical or electronic components, circuits, system assemblies or any other materials or substances or environments. Any advice, recommendations or information given orally or in writing, are not to be construed as an amendment or addition to the above warranty. See http://www.omron.com/global/ or contact your Omron representative for published information. Limitation on Liability; Etc. OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED IN CONTRACT, WARRANTY, NEGLIGENCE OR STRICT LIABILITY. Further, in no event shall liability of Omron Companies exceed the individual price of the Product on which liability is asserted. Suitability of Use Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product with respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases. NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY 2 ZW-8000/7000/5000 User’s Manual for Communications Settings

ZW-8000/7000/5000 User’s Manual for Communications Settings OR IN LARGE QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. Programmable Products Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence thereof. Performance Data Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate it to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability. Change in Specifications Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change part numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for your application. Please consult with your Omron’s representative at any time to confirm actual specifications of purchased Product. Errors and Omissions Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical or proofreading errors or omissions. 3

Precautions on Safety For details on the precautions on safety, refer to the following manual: "Precautions on Safety" described in Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) Precautions for Safe Use For details on the precautions for safe use, refer to the following manual: "Precautions for Safe Use" described in Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) Precautions for Correct Use For details on the precautions for correct use, refer to the following manual: "Precautions for Correct Use" described in Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) Editor's Note ● Meaning of Symbols Menu items that are displayed on the main or sub-display, and windows, dialog boxes and other GUI elements displayed on the personal computer are indicated enclosed by brackets [ ]. ● Visual Aids

Important Indicates points that are important to achieve the full product performance, such as operational precautions. Note Indicates application procedures. Indicates pages where related information can be found. Optional Indicates that the setting is optional in a configuration procedure.

Copyrights and Trademarks • Sysmac is a trademark or registered trademark of OMRON corporation in Japan and other countries for our FA equipment products. • Windows, Windows XP, Windows Vista, Windows 7, and Windows 8 are registered trademarks of Microsoft Corporation in the USA and other countries. • EtherCAT® is registered trademark and patented technology that is licensed by Beckhoff Automation GmbH, Germany. • ODVA, CIP, CompoNet, DeviceNet, and EtherNet/IP are trademarks of ODVA. • Microsoft product screen shots reprinted with permission from Microsoft Corporation. • Other system names and product names that appear in this manual are the trademarks or registered trademarks of the respective companies. 4 ZW-8000/7000/5000 User’s Manual for Communications Settings

ZW-8000/7000/5000 User’s Manual for Communications Settings Notice • Photocopying, duplication, or copying of all or part of this manual without permission is prohibited. • Please understand that the specifications and other contents of this manual are subject to change for improvement without notice. • Every effort has been made to ensure the accuracy of the contents of this manual, but if you should notice any mistake, questionable section, or the like in this manual, please contact an OMRON branch or sales office. If you do so, please also tell us the manual number, which is found at the end of the manual. 5

Relevant Manuals The following table provides the relevant manuals for the ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor. Read all of the manuals that are relevant to your system configuration and application before you use the ZW- 8000/7000/5000 series Confocal Fiber Type Displacement Sensor. Most operations are performed from the Sysmac Studio Automation Software. Refer to the “Sysmac Studio Version 1 Operation Manual (Cat. No. W504)” for information on the Sysmac Studio. Purpose of use Manual ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual for Communications Settings Overview of ZW-8000/7000/5000 series ● Setup and Wiring ● Basic Operation ● Function Setting ● Offline Setting ● Confirm the Menu List ● Connecting to the Sensor Controller ● Connecting to the Sensor Controller for Communication Settings ● Overview of Communication Specifica- tions ● Parallel I/O ● EtherCAT ● EtherNet/IP ● No-protocol ● Specifications and External Dimen- sions ● Processing Item List ● System Data List ● Object Dictionary ● Update the Firmware ● Troubleshooting ● Error Messages ● 6 ZW-8000/7000/5000 User’s Manual for Communications Settings

ZW-8000/7000/5000 User’s Manual for Communications Settings Related Manuals The related manuals are described the below tables. Please check the manuals. Manual name Cat. No. Model numbers Application Description Sysmac Studio Version 1 Operation Manual W504 SYSMAC-SE2@@@ Learning about the operating procedures and functions of the Sysmac Studio. Describes the operating proce- dures of the Sysmac Studio. Confocal Fiber Type Displacement Sensor ZW-8000/7000/5000 series User's Manual Z362 ZW-8000@ ZW-7000@ ZW-5000@ To learn how to set-up of Con- focal Fiber Type Displacement Sensor of ZW-8000/7000/5000 series. Describes how to set-up of Confocal Fiber Type Displacement Sensor of ZW- 8000/7000/5000 series. Confocal Fiber Type Displacement Sensor ZW-8000/7000/5000 series User's Manual for Communication Settings (This manual) Z363 ZW-8000@ ZW-7000@ ZW-5000@ To learn how to use communi- cation settings of Confocal Fiber Type Displacement Sensor of ZW- 8000/7000/5000 series. Describes how to use commu- nication settings of Confocal Fiber Type Displacement Sensor of ZW- 8000/7000/5000 series. 7

8 ZW-8000/7000/5000 User’s Manual for Communications Settings

ZW-8000/7000/5000 User’s Manual for Communications Settings Table of Contents Editor's Note . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Copyrights and Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Notice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Relevant Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Related Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 1.Overview of Communication Specifications 1-1 Overview of Communication Specifications . . . . . . . . . . . . . . . . . . . 14 Overview of Communication Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 1-2 Checking the System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . 15 System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 Connection Compatibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 2.Parallel I/O Connection 2-1 Parallel I/O Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 I/O Signal Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 Settings for Parallel Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 Settings for Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Settings for Judgment Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 Settings for Bank Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 Timing Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 3.EtherCAT Connection 3-1 EtherCAT Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 Overview of EtherCAT Networks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 Communication Methods for Measurement Sensor when Connected via EtherCAT 48Setting Communications Specifications (EtherCAT Communications) . . . . . . . 51 List of I/O Ports for Each Area (PDO Mapping) and Memory Assignments . . . 52 Timing Chart (EtherCAT) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75 Sample Ladder Program (EtherCAT) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85 Sysmac Device Features (EtherCAT) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86 4.EtherNet/IP Connection 4-1 EtherNet/IP Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 9

Introduction to EtherNet/IP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 Communication Methods for Measurement Sensor when Connected via EtherNet/ IP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .92 Setting Communications Specifications (EtherNet/IP) . . . . . . . . . . . . . . . . . . . 95 Tag Data Link Setting Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97 Memory Assignments and Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 Timing Chart (EtherNet/IP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112 Sample Ladder Program (EtherNet/IP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117 5.No-protocol Connection 5-1 No-protocol Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120 Outline of No-protocol Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120 Setting Communications Specifications (Ethernet Communications) . . . . . . . 121 Setting Communications Specifications (RS-232C Communications) . . . . . . 123 Setting for serial data output after application of measured value . . . . . . . . . 124 Command List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128 Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130 6.Sensor Controller Operations 6-1 Connecting Parallel I/O. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160 Settings for Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160 Settings for Judgment Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164 Settings for Processing When Measurement Is Not Possible . . . . . . . . . . . . . 166 Settings for Digital Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169 Settings for Parallel Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171 Settings for TIMING Input Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172 Setting for Internal Logging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173 6-2 Connecting with EtherCAT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175 Setting Fieldbus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175 Setting GATE Signal ON Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176 6-3 Connecting with EtherNet/IP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177 Network Settings of the Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177 Setting Fieldbus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178 6-4 Connecting by No-protocol Communications . . . . . . . . . . . . . . . . . 179 Initial Settings for No-protocol Communications . . . . . . . . . . . . . . . . . . . . . . . 179 Setting Communications Specifications (RS-232C Communications) . . . . . . 180 Setting Serial Data Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 181 Set the delimiter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182 7.Troubleshooting 7-1 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 184 Errors for EtherCAT Connection (Sysmac Error Status) . . . . . . . . . . . . . . . . . 184 Errors for EtherCAT Connection (SDO) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 196 10 ZW-8000/7000/5000 User’s Manual for Communications Settings

ZW-8000/7000/5000 User’s Manual for Communications Settings Errors for Ethernet or EtherNet/IP Connection . . . . . . . . . . . . . . . . . . . . . . . . 197 Errors Common to All Communication States . . . . . . . . . . . . . . . . . . . . . . . . . 198 7-2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199 8.Appendices 8-1 Processing Item Data List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202 8-2 System data list. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212 8-3 Object Dictionary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 214 Object Dictionary Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 214 Data type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 214 Description Format of Objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215 Communication Object . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216 PDO Mapping Object . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 219 Sync Manager Communication Object . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224 Manufacturer Unique Objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 277 Revision History. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278 11

12 ZW-8000/7000/5000 User’s Manual for Communications Settings Overview of Communication Specifications 1-1 Overview of Communication Specifications . . . . . . . . . . . . . . . . . . . . 14 1-2 Checking the System Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . 15 1-1 Overview of Communication Specifications Overview of Communication Specifications This chapter provides a general description of the communication specifications and sensor control method, which is necessary to know before setting up the communication between the ZW-8000/7000/5000 series and an external device. Overview of Communication Specifications 14 ZW-8000/7000/5000 User’s Manual for Communications Settings

Checking the System Configuration ZW-8000/7000/5000 User’s Manual for Communications Settings 1-2 Checking the System Configuration This product is a displacement sensor of the confocal fiber type. The connection with an external device such as a PLC and a personal computer allows a measurement command to be input and measurement results to be output from the external device. 15

System Configuration Connecting with EtherCAT (when the master is NX/NJ Series) EtherCAT Master Connecting with EtherCAT (when the master is other than NX/NJ Series) EtherCAT Master EtherNet/IP and No-protocol Ethernet Connections Control PLC, RC, or MC Sysmac Studio Standard Edition I/O control PLC NX/NJ-series Machine Automation Controller Trigger input sensor I/O control PLC NX/NJ-series Machine Automation Controller I/O control PLC General-purpose USB Cable General-purpose Ethernet Cable Industrial EtherNet/IP/ Ethernet Switching Hub Special EtherCAT Cable (RJ45/RJ45) Special EtherCAT Cable (RJ45/RJ45) ZW-8000@/7000@/5000@ 24-V Other EtherCAT slaves power supply Power Cable Special EtherCAT Cable (RJ45/RJ45) ZW-8000@/7000@/5000@ Power Cable Special EtherCAT Cable (RJ45/RJ45) Special EtherCAT Cable Parallel Cable(RJ45/RJ45) Sysmac Studio Displacement Sendor Edition Programmable Controller General-purpose with CJ2 CPU Unit Ethernet Cable 24-V Other EtherCAT slaves power supply Special EtherCAT Cable Trigger input (RJ45/RJ45) sensor Parallel Cable Sysmac Studio Displacement Sendor EditionProgrammable Controller General-purpose with CJ2 CPU Unit Ethernet Cable General-purpose Ethernet Cable ZW-8000@/7000@/5000@ General-purpose Ethernet Cable Power Cable Parallel Cable Control signal input sensor General-purpose Ethernet Cable 24-V power supply Checking the System Configuration 16 ZW-8000/7000/5000 User’s Manual for Communications Settings

Checking the System Configuration ZW-8000/7000/5000 User’s Manual for Communications Settings Connection Compatibility Connected to Other connection ZW-8000@/7000@/ 5000@ EtherCAT EtherNet/IP Ethernet (no-protocol) • EtherCAT and EtherNet/IP connections cannot be used at the same time. • Can be connected simultaneously via Ethernet with PC tools (Sysmac Studio, SmartMonitorZW) and another device (PLC etc). Can be connected simultaneously via Ethernet with PC tools (Sysmac Studio, SmartMonitorZW) and another device (PLC etc). The port number for the PC tool is 9600 (fixed) and 9602 (fixed). When connecting different devices, set the port number to other than 9600 and 9602 (default value is 9601). • When the measurement cycle is 40μs or less and ETherCAT is connected, analog output is not executed. RS-232C (no-protocol) Parallel I/O Cable EtherCAT --- Not compatible Compatible Compatible Compatible EtherNet/IP Not compatible --- Compatible Compatible Compatible Ethernet (no-protocol) Compatible Compatible --- Compatible Compatible RS-232C (no-protocol) Compatible Compatible Compatible --- Compatible Important Product Model Application ZW ZW-8000@/7000@/5000@ This Displacement Sensor performs measurements. PC Tool Sysmac Studio Standard Edition • SYSMAC-SE200D (no licenses included (media only)) • SYSMAC-SE201L (1-license edition) • SYSMAC-SE2@@L (multilicense editions (3, 10, 30, or 50 licenses)) Sysmac Studio Measurement Sensor Edition • SYSMAC-ME00@L (1 or 3 licences) This is the setup application. It is part of the Sysmac Studio Package and it runs on Windows. The Sysmac Studio comes in two different editions. • Sysmac Studio Standard Edition The Sysmac Studio provides an integrated development environment for the NX/NJ series Controllers and other Machine Automation Controllers and EtherCAT Slaves. It supports setup, programming, debugging, operation, and maintenance. The Sysmac Studio Standard Edition DVD includes Support Software for EtherNet/IP, DeviceNet, serial communications, and PT screen design (CX-Designer). Refer to the Sysmac catalog (Cat. No. P072) for details. • Sysmac Studio Measurement Sensor Edition This license provides the functions that are required to set up ZW-8000/ 7000/5000 Series Vision Sensors from the Sysmac Studio. This model number is for the license only. You must also purchase the DVD for the Sysmac Studio Standard Edition Ver.1.22 or higher. Special EtherCAT Cable * The Special EtherCAT Cable connects the Sensor to another Sensor or to another EtherCAT device. General-purpose Ethernet cable --- Prepare commercially available Ethernet cable satisfying the following requirements: • Category 5e or more, 30 m or less • RJ45 connector (8-pin modular jack) • For direct connection: Select cross cable. • For connection through an industrial switching hub: Select straight cable. Special RS-232C Cable For connecting to a PLC or programmable terminal • ZW-XPT2 For connecting to a PC • ZW-XRS2 Connect the sensor with a PLC, programmable terminal, or personal computer etc.. Industrial EtherNet/IP / Ethernet Switching Hub • W4S1-03B (3 ports type) • W4S1-05B • W4S1-05C (5 ports type) The Switching Hub connects multiple Sensors to one Touch Finder or one computer running PC Tool. 17

Product Model Application

EtherCAT Junction Slave • GX-JC03 (3 ports type) • GX-JC06 (6 ports type) Used to connect multiple sensors or PLCs using EtherCAT.

*: Refer to Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "9-1 Specifications and External Dimensions". Checking the System Configuration 18 ZW-8000/7000/5000 User’s Manual for Communications Settings Parallel I/O Connection 2-1 Parallel I/O Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 2-1 Parallel I/O Connection I/O Signal Functions The following describes the functions of I/O signals. Analog Output Terminals Analog output Name Description Analog voltage output This outputs the measured value from -10 V to +10 V as the voltage value. When measurement not possible: Approx. 10.8V (default value, can be selected by user) At alarm: Approx. 10.8V Analog current output This outputs the measured value, from 20 mA to 4 mA as the current value. When measurement not possible: Approx. 21 mA (default value, can be selected by user) At alarm: Approx. 21 mA 32-pole expansion connector Judgment output Name Description HIGH output Judgment result HIGH (HIGH threshold value < measured value) is output. PASS Output Judgment result PASS (LOW threshold value ≤ measured value ≤ HIGH threshold value) is output. LOW output Judgment result LOW (LOW threshold value > measured value) is output. ALARM output Name Description ALARM output This turns ON when there is a system error. BUSY output Name Description BUSY output This turns ON during sampling with the hold function enabled. It allows you to check whether or not the self-trigger is functioning correctly. It also turns ON during bank switching. This signal is turned ON in FUNC mode. ENABLE output Name Description ENABLE output This turns ON when the sensor is ready for measurement. This output is interlocked with the ENABLE indicator. Parallel I/O Connection 20 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings SYNCFLG/TRIGBUSY output Name Description SYNCFLG/TRIGBUSY output In the internal/PDO synchronized mode, this output signal operates as SYNCFLG. This turns ON when measurement synchronization processing is executed by SYNC input and the state changes to one where normal measurement values can be output. In the external synchronous measurement mode, this output signal operates as TRIGBUSY. This turns ON while a measurement by TRIG input is being performed. The next TRIG input cannot be turned ON until this turns OFF. STABILITY output Name Description STABILITY output Turns ON when the 1 surface is in the measuring range. LOGSTAT output Name Description LOGSTAT output This turns ON while internal logging is in execution. LOGERR output Name Description LOGERR output Turns ON when memory for Internal logging is full and the executes Internal logging. TASKSTAT output Name Description TASKSTAT output This turns ON when the measurement value is finalized. ZERO input Name Description ZERO input This is used to execute and clear a zero reset. RESET input Name Description RESET input This resets all executing measurements and outputs. While a RESET is being input, judgment output conforms to the non-measurement setting. If this RESET input switches ON while the hold function is used, the state in effect before the hold function was set will be restored. TIMING input Name Description TIMING input This timing input is for signal input from external devices. Use it for hold function timing. 21

LIGHT OFF input Name Description LIGHT OFF input Turns OFF the light for measurement. While LIGHT OFF is being input, the analog output and judgment output conform to the non- measurement setting. LOGGING input Name Description LOGGING input This is used to start internal logging. SYNC/TRIG input Name Description SYNC input This is used to synchronize imaging between multiple ZW. With external synchronous measurement mode selected, this signal works as TRIG input. For the following conditions, it performs as a SYNC input. • [Fieldbus] setting: When either [OFF] or [EtherNet/IP] is selected. • [Synchronous measurement mode] setting: When Internal/PDO synchronized mode is selected. For the following conditions, it performs as a TRIG input. • [Internal synchronous measurement mode] setting: When select [External synchronous mea- surement mode]. Important When the Internal synchronous measurement mode is External synchronous measurement mode, updates each input signals by inputting the TRIG input signal. To be enabled each input signal, enter the TRIG input signal. Settings for Parallel Input Used for preventing chattering in parallel input and malfunction due to noise. Item Setting item Setting value Description I/O settings Width of input signal 5 μs/10 μs/20 μs/50 μs/ filter 100 μs/200 μs/500 μs/ 1000 μs 100 μs (default value) ▶ Multi View Explore : [Bank Group] | [(Bank Data Name)] (double click) → Edit pane : [I/O Settings] icon ( ) → I/O Setting Screen : [I/O Settings] 1 Set [Width of input signal filter]. Set the width of filter. Parallel I/O Connection 22 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Example) When the filter setting value is 100μs (default value) As an ON state persists for 100μs, an ON or OFF state of TIMING signal is detected. Therefore, a delay in the detection of TIMING signal occurs for a period of time equivalent to the set filter value. Without chattering With chattering Settings for Analog Output The following describes the settings for outputting the current measurement results from the analog output of the analog output terminal block. Setting the analog output destination With analog output, the measurement results can be output converted to a current from 4 to 20 mA or a voltage from -10 to +10 V. Selects which to output, the current or the voltage. The same output destination is set for all banks. The output destination cannot be set separately for individual banks. Item Setting item Setting value Description Sensor settings Analog output Voltage output (default value) OFF state is detected as OFF state persists for 100μs. OFF state is detected as OFF state persists for 100μs. Important Note ON state is detected as ON state persists for 100μs. ON TIMING OFF ON state is detected as ON state persists for 100μs. ON TIMING OFF 100μs 100μs 100μs 100μs Voltage output Current output Current output The analog output destination can also be set with key operations on the Sensor Controller. Setting the analog output destination p.160 1 Set the operating mode to the FUNC mode. Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "3-2 Switching operation modes" 23

▶ Multi View Explore : [Device Group] | [(Sensor Name)] | [System] | [System Data] (double-click) → Edit pane : [Sensor settings] icon ( ) 2 Select the output destination from [Analog output]. Important When satisfies the following conditions, the analog output is disabled. A clamp value is output. • Measurement cycle is 40 μs or less. • EtherCAT communication is selected in the Fieldbus. Parallel I/O Connection 24 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Assigning Analog Output Set the task for which to output the results as analog. Item Setting item Setting value Description 25 Analog output Output object None/TASK1/TASK2/TASK3/ TASK4 Select the task to output as analog.

▶ Multi View Explore : [Bank Group] | [(Bank Data Name)] (double click) → Edit pane : [I/O Settings] icon ( ) → I/O Setting Screen : [Analog output] 1 Set the operating mode to the FUNC mode. Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "3-2 Switching operation modes" 2 Select the task from [Output object]. You can select from the above setting values. None/TASK1/TASK2/TASK3/TASK4 Note Analog output can also be assigned with key operations on the Sensor Controller. Assigning Analog Output p.161 Setting Monitor Focus With analog output, the relationship between the output value and measured value to be displayed can be set as desired to convert the measurement result to 4 to 20 mA current or -10 to +10 V voltage before output. Set the focus to match the connected external device. The output range can be set by entering the output value for the current or voltage values for any two points. Example: When setting 4 mA output (1st point) for measured value of 0 mm and 20 mA output for measured value of 1 mm (2nd point) (current output) Output current (mA)204Point 1 00 • Separate the two specified points by at least 1% of the rated measuring range of the connected Sensor Head or 40 μm. • After executing functions that add/subtract the span and offset values to/from the measurement value, execute the monitor focus. Item Setting item Setting value Description Monitor focus Point 2 Important Note Measured value 1 (mm) Monitor focus ON/OFF (default value) Sets monitor focus ON/OFF. Point1 Distance value -999.999999 to 999.999999 [mm] Sets the reference measured value for output. The default setting differs depending on the Sensor Head. Current output value 4 (default value) to 20 [mA] When the analog output destination is set to current, sets the current to be output when the distance value is measured. Voltage output value -10 (default value) to 10 [V] When the analog output destination is set to voltage, sets the voltage to be output when the distance value is measured. Point2 Distance value -999.999999 to 999.999999 [mm] Sets the reference measured value for output. The default setting differs depending on the Sensor Head. Current output value 4 (default value) to 20 [mA] When the analog output destination is set to current, sets the current to be output when the distance value is measured. Voltage output value -10 (default value) to 10 [V] When the analog output destination is set to voltage, sets the voltage to be output when the distance value is measured. The monitor focus can also be set with key operations on the Sensor Controller. Setting Monitor Focus p.161 Parallel I/O Connection 26 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings 1 Set the operating mode to the FUNC mode. Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "3-2 Switching operation modes" ▶ Multi View Explore : [Device Group] | [(Sensor Name)] | [Bank Group] | [(Bank Data Name)] (double click) → Edit pane : [I/O Settings] icon ( ) → I/O Setting Screen : [Analog output] 2 Select ON from [Monitor Focus]. 3 Enter the [Distance] and [Output value] at [Point1]. 4 Likewise, enter the [Distance] and [Output value] at [Point2]. Adjusting the analog output value Discrepancies may occur between the current value/voltage value output as analog set on the Sensor Controller and the current value/voltage value actually measured due to the conditions for the connected external device or other factors. The analog output adjustment function can be used to correct this discrepancy. The output values are corrected by entering the adjustment value for the current or voltage values for any two points. Important Set the output destination and select either current or voltage output beforehand. Also, connect the analog output signal line to an external ammeter or voltmeter. Item Setting item Setting value Description 27 Analog out- put adjust- ment Analog output adjustment ON/OFF (default value) Set analog output correction ON/OFF. Point1 Reference value 4 to 20 [mA]/-10 to 10 [V] Sets the current or voltage to be used as the correction 4 to 20 [mA]/-10 to 10 [V] Sets the current or voltage to be used as the correction (current/value) reference in the entry field on the left.

adjustment value -999 to 999 Sets the adjustment value when the reference value is measured in the entry field on the right.

Point2 Reference value (current/value) 4 to 20 [mA]/-10 to 10 [V] Sets the current or voltage to be used as the correction reference in the entry field on the left.

adjustment value -999 to 999 Sets the adjustment value when the reference value is measured in the entry field on the right. 1 Set the operating mode to the FUNC mode. Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "3-2 Switching operation modes" ▶ Multi View Explore : [Device Group] | [(Sensor Name)] | [Bank Group] | [(Bank Data Name)] (double click) → Edit pane : [I/O Settings] icon ( ) → I/O Setting Screen : [Analog output] 2 Select ON from [Analog output adjustment]. Important This setting is allowable only when Online. 3 Click [Setting]. The “Analog Output Adjust” popup menu appears. 4 Enter the [Distance] and [Output value] at [Point1], and click [Output]. 5 Likewise, enter the [Distance] and [Output value] at [Point2], and click [Output]. 6 Click [Setting]. NoteAnalog output values can also be adjusted with key operations on the Sensor Controller. Adjusting the analog output value p.163 Parallel I/O Connection 28 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Settings for Judgment Output The following describes the settings for outputting the judgment results from the judgment output of the 32-pole extension connector. Assigning judgment output Set the task for which to output the judgment results. The judgment results for the selected task are output from the following output terminals of the 32-pole extension connector. HIGH/PASS/LOW Item Setting item Setting value Description Judgment Output object TASK1/TASK2/TASK3/TASK4 Select the task for which to output the judgment result. 1 Set the operating mode to the FUNC mode. Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "3-2 Switching operation modes" ▶ Multi View Explore : [Bank Group] | [(Bank Data Name)] (double click) → Edit pane : [I/O Settings] icon ( ) → I/O Setting Screen : [Judgment] 2 Select the task from [Output object]. Note Judgment output can also be assigned with key operations on the Sensor Controller. Assigning judgment output p.164 29

Setting Operation at Judgment Output Set the hysteresis width of the judgment upper/lower limit values and judgment output timing. Refer to “4-4 Setting Threshold Value” described in Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User’s Manual (Z362). Item Setting item Setting value Description Judgment output Hysteresis width 0 to 99.9999mm Sets the hysteresis value (difference between operating point and recovery point) of the judgment upper/lower limit values when HIGH/ PASS/LOW judgment is unstable near the boundary. HIGH value threshold Satisfy the following conditions. HIGH threshold value ≥ HIGH threshold value - Hysteresis (hysteresis width) > LOW threshold value + Hysteresis (hysteresis width) ≥ LOW threshold value Timer mode OFF (default value) Outputs the judgment as soon as the judgment result has been applied. Off Delay Delays the falling edge of the outputs by the value set at [Timer Duration] after the judgment result has been applied. On Delay Delays the rising edge of the outputs by the value set at [Timer Duration] after the judgment result has been applied. Hysteresis (hysteresis width)Measured value LOW value threshold Action point Return point HIGH output ONOFF PASS output ONOFF LOW output ONOFF HIGH value threshold Measured value LOW value threshold HIGH output ONOFF PASS output ONOFF LOW output ONOFF HIGH value threshold Measured value LOW value threshold HIGH output ONOFF PASS output ONOFF LOW output ONOFF : Timer time HIGH value threshold Measured value LOW value threshold HIGH output ONOFF PASS output ONOFF LOW output ONOFF : Timer time Parallel I/O Connection 30 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Item Setting item Setting value Description Judgment Timer mode One Shot When the judgment result is turned ON, output by the value set as [Timer output Duration]. HIGH value threshold Timer time 1 (default value) to 5000 [ms] Measured value LOW value threshold HIGH output ONOFF PASS output ONOFF LOW output ONOFF : Timer time Sets the timer duration when the timer mode is other than OFF. 1 Set the operating mode to the FUNC mode. Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sensor User's Manual (Z362) "3-2 Switching operation modes" ▶ Multi View Explore : [Bank Group] | [(Bank Data Name)] (double click) → Edit pane : [I/O Settings] icon ( ) → I/O Setting Screen : [Judgment] 2 Set [Hysteresis Width]. 3 Select the judgment output timing to match operation of the external device from [Timer mode]. 4 Sets [Timer time]. Note The operations for judgment output can also be set with key operations on the Sensor Controller. Setting Operation at Judgment Output p.165 Important • The timer mode cannot be used when the measurement mode is external/PDO synchronous measurement mode. • Timer time shall be a value rounded up by Measurement Cycle Time unit. • When 2 area mode is selected, minimum value shall be doubled Measurement Cycle. 31

Settings for Bank Control This section describes the settings for controlling banks by using parallel I/O. Selecting banks The bank is selected in combinations of the bank select input signals (BANK_SEL1 to 3). Bank selection input 1 Bank selection input 2 (BANK_SEL1) (BANK_SEL2) • At most it takes about 100ms to switch banks. • During bank switching, the BUSY output becomes ON. • If the bank mode is set to [JUDGE], the bank cannot be switched at the external signal input because the number of banks increases to 32. Outputting the currently selected bank number The currently selected bank number is output. The output bank number depends on the combination of the bank number output signals (BANK_OUT1 to 3). Bank selection input 3 (BANK_SEL3) Selected bank OFF OFF OFF BANK1 ON OFF OFF BANK2 OFF ON OFF BANK3 ON ON OFF BANK4 OFF OFF ON BANK5 ON OFF ON BANK6 OFF ON ON BANK7 ON ON ON BANK8 Important Bank number output 1 (BANK_OUT1) Bank number output 2 (BANK_OUT2) Bank number output 3 (BANK_OUT3) Output bank OFF OFF OFF BANK1 ON OFF OFF BANK2 OFF ON OFF BANK3 ON ON OFF BANK4 OFF OFF ON BANK5 ON OFF ON BANK6 OFF ON ON BANK7 ON ON ON BANK8 Parallel I/O Connection 32 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Timing Chart The following shows the timing charts when communication is performed with external devices. Relationship between image capture duration and judgment output Item Min. Max. T0 Measuring cycle 60 μs (ZW-8000@) Depends on the set conditions 20 μs (ZW-7000@) 80 μs (ZW-5000@) T1 Exposure time 1 μs T0 - 3 μs T2 Response time of judgment output*1 − 250 μs + P*2 T3 Refresh cycle of judgment output*1 − T + 200 μs T4 Response time of analog output*1 − 80 μs (ZW-7000@/5000@) 200 μs (ZW-8000@) T5 Refresh time of analog output*1 − TO (1 area mode) 2TO (2 area mode) T6 Response delay time of Analog output − Output voltage: Approx 1.5 μs Current output: Approx 10 μs *1 In 2 area mode, T0 is added to the values in the chart. *2 P = 0 μs (ZW-7000@/5000@) 100 μs (ZW-8000@) Exposure Judgment output (HIGH/PASS/LOW) Explanation of operations (1) During each measuring cycle, the light source is lit and exposure is started. (2) After the end of exposure, measurement starts. (3) After the end of measurement, the judgment result and the analog output are updated. (1) (2) (3) T1 T0 T4 T6 T2 T5 Analog output T3 33

Hold (peak/bottom/peak to peak/average) Item Min. Max. T18 RESET Minimum input time 2 × T0 + C*1 + 1100 μs − T19 TIMING time*2 - BUSY ON maximum response − TO + C*1+ P*3 + 80 μs (When specify timing to measure mode 2 × TO is + selected) C*1+ P*3 + 80 μs (When specify timing to exposure mode is selected) T20 TIMING minimum input time*2 T0 (Minimun + C*1+ OFF 20 μs time is T0 + C*1 + 60 − μs.) T21 TIMING time*2 - BUSY OFF maximum response − T0 + C*1+ P*3 + 300 μs T22 BUSY judgment/analog OFF - maximum output*2 response time of − 30 μs T23 RESET RESET *1 C = Filter width of input signal *2 In 2 area mode, T0 is added to the values in the chart. *3 P = 0 μs (ZW-7000@/5000@) 100 μs (ZW-8000@) Explanation of operations (1) The TIMING input is turned ON. (2) During the TIMING input minimum time, when the TIMING input is ON, sampling is started and the BUSY output is turned ON. (3) The TIMING input is turned OFF. (4) After the TIMING input turns OFF, sampling is ended and the Judgment result and Analog output are updated. The BUSY output is also turned OFF. (5) After the Judgment result, and the analog output are updated. (6) The RESET input is turned ON. If the RESET input is turned ON during the RESET input minimum time, the measured value is reset. (7) The judgment result and analog output are reset. (8) The RESET input is turned OFF. (9) After the RESET input is turned OFF, the TIMING input can be turned ON again. maximum OFF-TIMING response ON minimum time and time*2 − 2 × TO + C*1 + 3000 μs T39 TIMING OFF - RESET ON minimum time*2 TO + C*1+ 60 μs (When specify timing to measure mode 2 × TO is + selected) C*1 + 60 μs (When specify timing to exposure mode is selected) ɻ (2) (3) (4)(5) (6) TIMING input RESET input BUSY output Judgment output (HIGH/PASS/LOW) Analog output (1) (8) (7) (9) ON OFFON OFF T39 T18 T19 T20 T21 T22 T23 T23 ON OFF Parallel I/O Connection 34 ZW-8000/7000/5000 User’s Manual for Communications Settings

Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Important • Judgment and Analog output may not be updated until BUSY is turned ON after Sampling procedure. • When the setting for non-measurement is “CLAMP”, if the sampling value is an abnormal value or an undetermined value *, sampling is not executed. If sampling has been started, it is stopped. The output value is as follows. • Hold the clamp value. • To start and continue sampling even if a sampling value is an abnormal value or an undetermined value, set “KEEP” as the non-measurement setting. *: After the start of measurement, if measurement results are not obtained the number of times required to take the average, the measurement result is not applied. *: The RESET of (6) through (8) can be omitted. When performing TIMING input consecutively, make sure that the interval between TIMING inputs is the minimum OFF time of T20 or longer. Hold (auto peak/auto bottom/auto peak-to-peak) Item Min. Max. T18 RESET minimum input time 2 × T0 + C*1 + 1100 μs − T22 BUSY-OFF maximum response time of judgment/analog output *1 C = Filter width of input signal *2 In 2 area mode, T0 is added to the values in the chart. RESET input BUSY output Judgment output (HIGH/PASS/LOW) Analog output Explanation of operations (1) The RESET input is turned ON. If the RESET input is turned ON during the RESET input minimum time, the measured value is reset. (2) Judgment result is reset. The BUSY output is turned OFF. (3) After judgement result is reset, Analog output is reset. (4) The RESET input is turned OFF. (5) The BUSY output is turned ON. • Judgment and Analog output may not be updated until BUSY is turned OFF after Sampling procedure. • When the setting for non-measurement is “CLAMP”, if the sampling value is an abnormal value or an undetermined value *, sampling is not executed. If sampling has been started, it is stopped. The output value is as follows. • Hold the clamp value. • The BUSY signal is turned OFF. • To start and continue sampling even if a sampling value is an abnormal value or an undetermined value, set “KEEP” as the non-measurement setting. *: After the start of measurement, if measurement results are not obtained the number of times required to take the average, the measurement result is not applied. − 0 μs (1 area mode) TO (2 area mode) T24 BUSY OFF maximum response time*2 − T23 T25 RESET time*2 - BUSY ON maximum response − T23 (1) (2) (3) (4) ON OFF ON OFF(5) T18 T24 T22 T25 Important 35

Hold (sampling) Item Min. Max. T18 RESET Minimum input time 2 × T0 + C*1 + 1100 μs − T19 TIMING time*2 - BUSY ON maximum response − TO + C*1 + P*3 + 80 μs (When specify timing to measure mode 2 × TO is + selected) C*1 + P*3+ 80 μs (When specify timing to exposure mode is selected) T20 TIMING minimum input time*2 T0 (Minimum + C*1 + OFF 20 μs time is T0 + C*1 + 60 μs.) *1 C = Filter width of input signal *2 In 2 area mode, T0 is added to the values in the chart. *3 P = 0 μs (ZW-7000@/5000@) 100 μs (ZW-8000@) Explanation of operations (1) The TIMING input is turned ON. (2) During the TIMING input minimum time, when the TIMING input is ON, sampling is started and the BUSY output is turned ON. The measurement result is sampled and the judgment result is output. (3) After the Judgment result, and the analog output are updated. (4) The RESET input is turned ON. If the RESET input is turned ON during the RESET input minimum time, the measured value is reset. (5) The judgment result and the analog output are reset. (6) The RESET input is turned OFF. (7) After the RESET input is turned OFF, the TIMING input can be turned ON again. • Judgment and Analog output may not be updated until BUSY is turned OFF after Sampling procedure. • When the setting for non-measurement is “CLAMP”, if the sampling value is an abnormal value or an undetermined value *, sampling is not executed. The output value is as follows. • Hold the clamp value. − T22 BUSY-ON maximum response time of judg- ment/analog output − 30 μs T23 RESET RESET maximum OFF-TIMING response ON minimum time and time*2 − T0+C*1+3000 μs T39 TIMING OFF - RESET ON minimum time*2 TO + C*1 + 60 μs (When specify timing to measure mode 2 × TO is + selected) C*1 + 60 μs (When specify timing to measure mode is selected) (1) (2) (3) T19 T22 (4) T23 (6) (5) T39 (7) T23 Judgment output (HIGH/PASS/LOW) Analog output T20 T18 TIMING input OFFON RESET input OFF ON BUSY output OFF ON Important Parallel I/O Connection 36 ZW-8000/7000/5000 User’s Manual for Communications Settings Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings • The BUSY signal is not turned ON. *: After the start of measurement, if measurement results are not obtained the number of times required to take the average, the measurement result is not applied. *: The RESET of (6) through (8) can be omitted. When performing TIMING input consecutively, make sure that the interval between TIMING inputs is the minimum OFF time of T20 or longer. Bank Switching Item Min. Max. T7 Input response time − 200 ms T8 Bank switching time − 100 ms T9 Measurement start response time − Depends on the set conditions T10 Maximum response time of judgement ON − Depends on the set conditions (1) (2) (3) (4) (5) 37 T7 BANK_SEL input ʢBANK_SEL1/2/3ʣ BANK_OUT output ʢBANK_OUT1/2/3ʣ BUSY output T8 T9 T10 T9 T10 ON OFF

Explanation of operations (1) The BANK_SEL signal is switched to the bank number to switch to. (2) After the input response time, the measurement stops and the BUSY output is turned ON, The ENABLE output, STABILITY output, HIGH/PASS/LOW output, and TASKSTAT output are turned OFF at the same time. (3) After bank switching ends, the BUSY output is turned OFF and the BANK_ OUT output is switched. (4) Measurement is restarted and the ENABLE output, STABILITY output is turned ON. (5) When the measurement result is applied, the HIGH/PASS/LOW output and TASKSTAT output turn ON. Under the following conditions, the sensor controller display section does not change in conjunction with the output signal and will continue to display the previous measurement state. • When external synchronization measurement mode is set and TRIG input is not on. • When the PDO synchronous measurement mode is set and EtherCAT is not established.

ENABLE output ON OFF

STABILITY output OFF ON

JUDGMENT output 㸦HIGH/PASS/LOW㸧 Important ON OFF

TASKSTAT output OFF ON LIGHT OFF Item Min. Max. T9 LIGHT OFF - ENABLE OFF maximum response − 2 × T0 + C*1 + P*2 + 300 μs time T10 LIGHT OFF minimum input time T0 + C*1 + 20 μs − (Minimum C*1 + 60 μs.) OFF time is T0 + T11 LIGHT OFF - ENABLE ON maximum response time − 2 × T0 + C*1 + P*2 + 150 μs *1 C = Filter width of input signal *2 P = 0 μs (ZW-7000@/5000@) 100 μs (ZW-8000@) (1) (2) (3) (4) T10 T9 T11 LIGHT OFF input ON OFFENABLE output ON OFF Explanation of operations (1) The LIGHT OFF input is turned ON. (2) After the LIGHT OFF input is turned ON, the light source is turned OFF and the ENABLE output is turned OFF. (3) The LIGHT OFF input is turned OFF. (4) After the LIGHT OFF input is turned OFF, the light source is turned ON and the ENABLE output is turned ON. Zero reset Item Min. Max. T7 Input response time − 3 ms + T0 × 2 T13 ZERO input time 50 ms 0.8 s T14 ZERO input cancel time 1s − (1) (2) (3) (4) (5) T14 ON OFF Judgment output (HIGH/PASS/LOW) Explanation of operations (1) The ZERO input is turned ON. (2) After the ZERO input time, the ZERO input is turned OFF. (3) After the ZERO input is turned OFF, the zero reset is executed and the judgment results reflected in the measurement results are output. (4) The ZERO input is turned ON. (5) After at least the cancel time of ZERO input has passed, the zero reset is cancelled. T13 T7 ZERO input Parallel I/O Connection 38 ZW-8000/7000/5000 User’s Manual for Communications Settings Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Operating Mode Switching Item Min. Max. T3 Response time of analog output − T0 + 20 μs T9 Measurement start response time − Depends on the set conditions (1) (2) (3) (4) T3 RUN FUN RUN Judgment output Explanation of operations (1) After the mode is switched from RUN to FUNC mode, the BUSY output and ENABLE output are turned OFF. The judgment outputs all go OFF. (2) The response time of analog output after the BUSY output is turned ON, the analog output is output clamped. (3) After the mode is switched from the FUNC mode to the RUN mode, the BUSY output is turned OFF. (4) Measurement is restarted and the ENABLE signal is turned ON, then the measurement results are output. Important Under the following conditions, the sensor controller display section does not change in conjunction with the output signal and will continue to display the previous measurement state. • When external synchronization measurement mode is set and TRIG input is not on. • When the PDO synchronous measurement mode is set and EtherCAT is not established. T9 MODE Analog output BUSY output OFF ON ENABLE output OFF ON (HIGH/PASS/LOW) All OFF CLAMP 39 Measurement cycle Item Min. Max. T26 SYNC ON - SYNCFLG_ON maximum response time *1 C = Filter width of input signal *2 P = 0 μs (ZW-7000@/5000@) 200 μs (ZW-8000@) Explanation of operations (1) Turns ON SYNC input (2) After SYNC input was turned ON, the image capture completion signals from the 2 measurement sensors synchronize and a measurement is performed. (3) SYNCFLG output turns ON. (4) The SYNC input is turned OFF. (5) SYNCFLG output is turned OFF after SYNC input is turned OFF. Example of minimum SYNC cycle − T0 + C*1 + P*2 + 130 μs T27 SYNC_OFF - SYNCFLG_OFF maximum response time − T0 + C*1 + P*2 + 250 μs T28 Response time when restart to capture after SYNC input − T0 + C*1 + 70 μs T37 SYNCFLG_ON - SYNC_OFF time 0 μs − T38 Minimum SYNC cycle T0 + T26 + T27 + T37 − (1) (2) (3) (4) (5) T26 T37 T27 SYNC input SYNCFLG output T38 T28 Image capture duration measurement sensor 1 Image capture duration measurement sensor 2 T0 Measurement cycle T0 ZW-7000@/5000@ ZW-8000@ C = 5 μs C = 100 μs C = 5 μs C = 100 μs 20 μs 450 μs 640 μs 610 μs 800 μs 40 μs 510 μs 700 μs 670 μs 860 μs 60 μs 570 μs 760 μs 730 μs 920 μs 80 μs 630 μs 820 μs 790 μs 980 μs 160 μs 870 μs 1060 μs 1030 μs 1220 μs 250 μs 1140 μs 1330 μs 1300 μs 1490 μs 500 μs 1890 μs 2080 μs 2050 μs 2240 μs Parallel I/O Connection 40 ZW-8000/7000/5000 User’s Manual for Communications Settings Parallel I/O Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Internal logging Item Min. Max. T6 LOGGING ON - LOGSTAT ON maximum − T0 + C*1 + 30 μs response time T7 LOGGING minimum input time T0 + C*1 + 20 μs − T8 LOGGING OFF - LOGSTAT OFF maximum response time *1 C = Filter width of input signal Explanation of operations (1) Turns ON LOGGING input. (2) Internal logging starts when LOGSTAT output is turned ON after LOGGING input is turned ON. (3) Turns OFF the LOGGING input. (4) Finishes the Internal logging when LOGSTAT output is turned OFF after LOGGING input is turned OFF. However, if an insufficient logging memory occurs, turns ON the LOGERR output. The LOGERR output is turns OFF simultaneously with the LOGGING input turned OFF. − T0 + C*1 + 250 μs (1)(2) LOGGING input LOGSTAT output (3) (4) T6 T7 T8 ON OFFON OFF 41 External synchronous measurement mode Item Min. Max. T29 Minimum TRIG ON time C*1 + 20 μs − T30 Minimum TRIG OFF time C*1 + 60 μs − T31 Minimum TRIG cycle T29 + T30 − T32 TRIG - TRIGBUSY response − C*1 + 30 μs T33 TRIG_BUSY ON time T0 + 100 μs T0 + 200 μs T34 TRIG - Judgment output response − T0 + T2 + T29 T35 TRIG - Analog output response − T0 + T4 + T29 T36 TRIG-Measurement cycle start time − T29 *1 C = Filter width of input signal (1) (2) (3) (4) (5) T29 T31 T30 TRIG input T32 T33 TRIG BUSY output T35Analog output T34 Judgment output (H, P, L, TSAK_STAT) T36 Image capture duration T0Explanation of operations (1) Turns ON TRIG input. (2) TRIG BUSY output turns ON and capturing images is started to perform a measurement. (3) TRIG BUSY output turns OFF, allowing the next TRIG input to be received. (4) After the measurement has been completed, the judgement result and analog output are updated. (5) Image capture and measurement are not performed without TRIG input. Example of minimum TRIG cycle Measurement cycle T0 C = 5 μs C = 100 μs 20 μs 120 μs 280 μs 40 μs 140 μs 280 μs 80 μs 180 μs 280 μs 160 μs 260 μs 280 μs 250 μs 350 μs 350 μs 500 μs 500 μs 600 μs Parallel I/O Connection 42 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection 3-1 EtherCAT Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 3-1 EtherCAT Connection Overview of EtherCAT Networks EtherCAT (Ethernet Control Automation Technology) is a high-performance industrial network system based on Ethernet system and can realize faster and more efficient communications. Each node achieves a short communications cycle time by transmitting Ethernet frames at high speed. Furthermore, even though EtherCAT is a unique protocol, it offers excellent general-purpose applicability. For example, you can use Ethernet cables because EtherCAT utilizes standard Ethernet technology for the physical layer. And the effectiveness of EtherCAT can be fully utilized not only in large control systems that require high processing speeds and system integrity, but also in small and medium control systems. Features of EtherCAT EtherCAT has the following features. ● Extremely high-speed communications with speed of 100 Mbps It dramatically shortens the I/O response time from generation of input signals to transmission of output signals. By fully utilizing the optimized Ethernet frame bandwidth to transfer data using a high-speed repeat method, it is possible to efficiently transmit a wide variety of data. ● Extremely High Compatibility with Ethernet EtherCAT is an open network with extremely high compatibility with conventional Ethernet systems. Structure of EtherCAT EtherCAT does not send data to individual slave nodes on the network, instead, it passes Ethernet frames through all of the slave nodes. When frame passes through a slave node, the slave node reads and writes data in the areas allocated to it in the frames in a few nanoseconds. Ethernet frames sent from the EtherCAT Master Unit go through all the EtherCAT Slave Units without stopping on the way. Once they reach the final Slave Unit, they are sent back from the final Slave Unit, pass through all Slave Units again, and return to the EtherCAT Master Unit. With this structure, EtherCAT secures high-speed and real-time data transmission.

EtherCAT Master Unit Slave Unit Slave Unit Slave Unit Data OUTIN • Reading output data addressed to the local Slave Units • Writing input data Ethernet frame

EtherCAT Connection 44 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings It is the “EtherCAT datagram” stored directly in an Ethernet frame that exchanges data regularly between the EtherCAT Master Unit and Slave Units. Each “EtherCAT datagram” is configured with header (data length, including address of one or more Slave Units, etc.), data, working counter (check bit). When an Ethernet frame is compared to a “train”, an EtherCAT datagram can be considered as “railway car.” Ethernet frame Ethernet header Ethernet data (Maximum 1498 bytes) CRC EtherCAT header 1...n EtherCAT datagram 1st EtherCAT datagram Header Data WKC WKC : Working counter EtherCAT frame 2nd EtherCAT datagram . . . . . n th EtherCAT datagram 45 EtherCAT Connection Communications Types of EtherCAT EtherCAT provides the following two types of communication functions. PDO communications are always updating data per communication cycle on EtherCAT, while SDO communications are processed in between those updates. ● Process data communications functions (PDO communications) This communication function is used to transfer process data in real time in a fixed-cycle. By mapping logical process data space to each node by the EtherCAT Master Unit, it achieves fixed-cycle communications among the EtherCAT Master Unit and Slave Units. EtherCAT Master Unit Slave Unit Ethernet frame ● Mailbox communications functions (SDO communications) It refers to message communications. At any timing, the EtherCAT Master Unit transmits commands to Slave Units and the Slave Units return responses to the EtherCAT Master Unit. It performs the following data communications: • Read and write process data • Slave Unit Settings • Monitoring the slave unit state Slave Unit Slave Unit Slave Unit Ethernet header EtherCAT header 1st EtherCAT datagram 2nd EtherCAT datagram 3rd EtherCAT datagram . . . CRC Logic process data ...Data a ...Data b Data c ... EtherCAT Connection 46 ZW-8000/7000/5000 User’s Manual for Communications Settings

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings ● Synchronization with Distributed Clocks A mechanism called a distributed clock (DC) is used to synchronize EtherCAT communications. The DC mode is used for ZW-8000/7000/5000 series to perform highly accurate control of measurement start timing. In DC mode, the master and slaves are synchronized by sharing the same clock. Interruptions (Sync0) are generated in the slaves at precise intervals based on this clock. Displacement Sensor control is carried out at this precise timing. Communications Cycle (DC Cycle) The communications cycle is determined by setting the Sync0 signal output cycle. Set the Output cycle 125μs, or longer. For details on the setting procedure, refer to "Sysmac Studio Version 1 Operation Manual" (W504). 47

Communication Methods for Measurement Sensor when Connected via EtherCAT Communications between the EtherCAT master and the displacement sensor is performed over EtherCAT to enable control from the master by control signals and data output after measured values are applied. When the displacement sensor is connected to an NX/NJ series CPU Unit via EtherCAT, Sysmac Studio (standard edition) is used to register the ZW to the EtherCAT slave configuration on the network configuration edit pane. For details on registration methods, refer to Sysmac Studio Version 1 Operation Manual (W504) “4-2 Controller Configuration/Setting.” Important • Up to 32 measurement sensors can be connected via EtherCAT. • If EtherCAT is set to enables to perform communications over EtherCAT, the EtherNet/IP communications setting is disabled and EtherNet/IP communications is no longer possible. Setting Communications Specifications (EtherCAT Communications) p.51 Communications method using process data objects (PDO) ● Control of displacement sensors by control/status signals With EtherCAT communications, process data objects (PDO) are used to perform PDO communications (cyclic communications). Control of the displacement sensor is performed by storing control signals/command from the master to the displacement sensor, status signals from the displacement sensor to the master, and command responses to the I/O ports (or I/O memory) (*1)of the Controller. *1: When connected to the NX/NJ series, “I/O ports” are used, and when connected to the CJ series, “I/O memory” is used. Explanations from here on are for when the connection is to the NX/NJ series. Controller (master) NX/NJ-series CPU Unit Displacement Sensor (slave) Control signal, I/O ports Commands Command area TIMING input Current bank settings Response area command, etc. Response HOLDSTAT output Command Response, etc. EtherCAT communications The Controller sends the instruction to the displacement sensor over EtherCAT by switching the control signal bit assigned with control to be executed to ON. The displacement sensor executes the instruction, and updates the status signal bit according to the result to return it over EtherCAT. ÅB When instructions are executed by control commands, control commands are sent to the displacement sensor over EtherCAT by writing the control command, for example, to I/O port Command and then turning the control command execution (EXE) bit ON. The displacement sensor executes that control command, and returns the response to the Controller over EtherCAT. The Controller stores the response to I/O port Response, for example. EtherCAT Connection 48 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings ● Output of displacement sensor measurement data to output area The measurement data of all tasks is automatically output from the displacement sensor to I/O port Measurement Value of Output data1 to 4 immediately after the measured value is applied. This enables the measurement results of all tasks to be easily handed over to the Controller. With EtherCAT communications, communications is performed via the I/O ports of the following four area on the Controller. Sysmac error status area I/O ports are used only when an NX/NJ series CPU unit is connected as the master. 49 Control by control/ status signals (1) I/O ports of instruction area I/O ports to which the user writes control signals to be executed on the displacement sensor and control com- mands I/O ports to which the user writes control signals to be executed on the displacement sensor and control com- mands I/O ports to which the user writes control signals to be executed on the displacement sensor and control com- mands

Controller (master) Displacement sensor

NX/NJ-series CPU Unit (slave) After applying measured value I/O ports Output area Data Automatically output 4 measured data, etc.

EtherCAT communications

(2) I/O ports of response area I/O ports to which the displacement sensor writes the control signals written to the instruction area and the result of executing control commands Data output after applica- tion of measured value (3) I/O ports of output area I/O ports to which the displacement sensor writes the out- put data accompanying measurement after application of the measured value For error status (4) I/O ports of Sysmac error status area I/O ports to which the displacement sensor writes the error status

Controller (master) Output area I/O port I/O Ports in Sysmac Error Status Area Displacement Sensor (slave) Command area I/O port Command Response area I/O port Response The following control commands are The control commands written to the I/O written to the Displacement Sensor. ports in the Command Area are executed. The results of execution are written to the I/O ports in the Response Area. Measurement results are written to the I/O ports in the Data Output Area. Error status information is written to the I/O ports in the Sysmac Error Status Area. Command/ response communi- cations Data output after measure- ments Error status Execution After applying measured value ● Sysmac error status The execution results from the Displacement Sensor are written here. Output data from the Displacement Sensor is written here. Error status information from the Displacement Sensor is written here. Communications method using service data objects (SDO) The ZW series supports SDO communications. SDO communications is used for setting objects and monitoring the status of the ZW series. Objects can be set or the status monitored by reading and writing data to entries in the object dictionary of the host Controller. EtherCAT Connection 50 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Setting Communications Specifications (EtherCAT Communications) Setting default settings for EtherCAT communications Set the default settings for EtherCAT communications. Item Description Range 51 Fieldbus Select whether to use EtherNet/IP communications or EtherCAT communications. ▶ Multi View Explore : [Device Group] | [(Sensor Name)] | [System] | [System Data] (double-click) → Edit pane : [Ethernet Communications Settings] icon ( ) • This setting contemns will be effected when launch the Sensor Controller. • Save the setting data after changing this setting, and then restart to the Sensor Controller. OFF EtherNet/IP EtherCAT (default value) GATE signal ON time Set the output time of the GATE signal for notifying the timing that the measured value was updated when hold is output. 0 to 100ms 1ms (default value) 1 Set the fieldbus settings. Select [EtherCAT] at [Fieldbus]. 2 Set the output time of the GATE signal. Set the value at [GATE signal ON time]. Note

The setting of default settings for EtherCAT communications can also be set by the operating keys on the Sensor Controller. Setting Fieldbus p.175 Setting GATE Signal ON Time p.176 Important List of I/O Ports for Each Area (PDO Mapping) and Memory Assignments When connection destination is an NX/NJ series Controller This section describes the respective I/O ports of the instruction area, response area, output area, and Sysmac error status area. ● I/O ports of instruction area Controller (master) → Displacement sensor (slave) I/O port name Signal Signal name Function

Sensor Head Control Signal1 Sensor head control signal1 EXE EXE Control command execution Turns ON when the user (Controller) instructs execution of control commands to the displacement sensor. (Turns ON after the control command code and parameters are set.) Is returned to OFF on condition (input condition) that the user (Controller) turns the control command completion signal (FLG signal) from the displacement sensor ON. SYNC SYNC Measurement synchronous start Turns ON when the user (Controller) instructs measurement synchronization to the displacement sensor. Is returned to OFF on condition (input condition) that the user (Controller) turns the measurement synchronization completion signal (SYNCFLG signal) ON.

ERCLR ERCLR Error clear Turns ON when the displacement sensor error signal (ERR signal) turns OFF. Is returned to OFF on condition (input condition) that the user (Controller) turns the error signal (ERR signal) OFF.

Sensor Head Control Signal2 Sensor head control signal2

TIMING TIMING Timing Turns ON when the user (Controller) instructs start of hold sampling to the displacement sensor. Turns OFF when the user (Controller) instructs end of hold sampling to the displacement sensor. RESET RESET Reset Turns ON when the user (Controller) instructs judgment processing and output reset to the displacement sensor. If the hold function is used, the state in effect before the hold function was set will be restored. Turns OFF when the user (Controller) ends judgment processing and output reset to the displacement sensor. LIGHTOFF LIGHTOFF Light metering OFF Turns ON when the user (Controller) instructs logical beam OFF to the displacement sensor. Turns OFF when the user (Controller) instructs logical beam ON to the displacement sensor. ZERO_T1 to 4 ZERO_T1 to 4 Zero reset execution Turns ON when the user (Controller) instructs execution of zero reset of TASK1 to 4 to the displacement sensor. Is returned to OFF on condition (input condition) that the user (Controller) turns the zero reset completion signal (ZEROSTAT signal) from the displacement sensor ON. ZEROCLR_T1 to 4 ZEROCLR_T1 to 4 Zero reset cancel Turns ON when the user (Controller) instructs zero reset cancel of TASK1 to 4 to the displacement sensor. Is returned to OFF on condition (input condition) that the user (Controller) turns the zero reset completion signal (ZEROSTAT signal) from the displacement sensor OFF. EtherCAT Connection 52 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings I/O port name Signal Signal name Function Command Command code Command code Stores the command code. Command Parameter 1 Parameter 1-3 Command parameter Stores the command parameter. to 3 Note • In the FUNC mode, control signals other than ERCLR and LIGHTOFF cannot be executed. • Multiple control signals cannot be executed in the same cycle. Note, however, that when zero reset execution/ cancellation are performed simultaneously on multiple tasks, ZERO_T1 to 4 and ZEROCLR_T1 to 4 can be executed in the same cycle. Also, all control signals can be executed in the same cycle on ERCLR and LIGHTOFF. • When the status of control signals differs from that of the input status of parallel I/O, processing is executed of one of the statuses is ON. • SYNC can be used only in EtherCAT communications. It cannot be used in EtherNet/IP communications. ● I/O ports of response area Displacement sensor (slave) → Controller (master) I/O port name Signal Signal name Function Sensor Head Status Signal1 Note Sensor Head Status Signal1 FLG FLG Control command completion Turns ON when the displacement sensor completes control command execution. (Turns ON after the control command code, response code and response status are stored.) Automatically turns OFF if the control command execution signal (EXE signal) from the user (Controller) turns OFF. SYNCFLG SYNCFLG Measurement synchronization completion Turns ON when the displacement sensor executes measurement synchronization processing and the state changes to one where normal measured values can be output. Automatically turns OFF if the measurement synchronization signal (SYNC signal) from the user (Controller) turns OFF. READY READY Ready Turns OFF when the displacement sensor cannot execute control commands or measurement synchronization processing. Turns ON when the displacement sensor can execute control commands or measurement synchronization processing. SEQUENCE SEQUENCE Measurement execution status Turns ON from OFF when the Vision Sensor starts to capture at the timing of the Sync0 of EtherCAT. Turns OFF from ON when the output processing which outputs the measurement result to the output area is completed. RUN RUN Run screen Turns ON when the displacement sensor is in the RUN mode. Turns OFF when the displacement sensor is in the FUNC mode. ERR ERR Error Turns ON when a displacement sensor error is detected. Turns OFF when the displacement sensor is normal. After it turns ON, it never turns OFF until the error clear signal (ERCLR signal) from the user (Controller) turns ON. BANKOUT_A to E BANKOUT_A to E Current bank number This outputs the currently specified bank number. It expresses the bank number in combinations of BANKOUTx_A to E. (For details of combinations, see .) 53 I/O port name Signal Signal name Function

Sensor Head Status Signal2 Sensor Head Status Signal2

HOLDSTAT HOLDSTAT Hold execution status Turns ON when the displacement sensor is in the hold sampling period. Turns OFF when the displacement sensor is outside the hold sampling period. RESETSTAT RESETSTAT Reset execution state Turns ON when the displacement sensor is in the reset execution state. Turns OFF when the displacement sensor is in the reset non-execution state.

LIGHT LIGHT Logical beam lighting state Turns ON when the logical beam is lit. Turns OFF when the logical beam is out.

STABILITY STABILITY Measurement position Turns ON when the measured value is in the measuring range. Turns OFF when the measured value is outside the measuring range. ENABLE ENABLE Measurement state Turns ON when the displacement sensor is ready for measurement. Turns OFF when the displacement sensor cannot measure (excessive or insufficient received light, outside measuring range, Calibration ROM not mounted, during FUNC mode non-measurement). GATE GATE Data output completed Turns ON when the displacement sensor completes control data output when hold is set. The displacement sensor automatically turns OFF one Gate period after turning ON. OR OR Overall judgment result Turns ON when even one of the judgment result of the displacement sensor TASK1 to 4 is other than PASS. Turns OFF when all of the judgment result of the displacement sensor TASK1 to 4 is PASS. HIGH_T1 to 4 HIGH_T1-4 HIGH output Turns ON when the judgment result of the displacement sensor TASK1 to 4 is HIGH (HIGH threshold < measured value). Turns OFF when the judgment result of the displacement sensor TASK1 to 4 is other than HIGH. PASS_T1 to 4 PASS_T1-4 PASS Output Turns ON when the judgment result of the displacement sensor TASK1 to 4 is PASS (LOW threshold ≤ measured value ≤HIGH threshold). Turns OFF when the judgment result of the displacement sensor TASK1 to 4 is other than PASS. LOW_T1 to 4 LOW_T1-4 LOW output Turns ON when the judgment result of the displacement sensor TASK1 to 4 is LOW (LOW threshold > measured value). Turns OFF when the judgment result of the displacement sensor TASK1 to 4 is other than LOW. ZEROSTAT_T1 to 4 ZEROSTAT_T1-4 Zero reset state Turns ON when the displacement sensor TASK1 to 4 is in the zero reset execution state. Turns OFF when the displacement sensor TASK1 to 4 is in the zero reset non-execution state. TASKSTAT_T1 to 4 TASK_STATUS1-4 TASK status Turns ON when the measurement data is finalized for each TASK1 to 4. Response Command code Command code The executed command code is returned. Response Code Response code Response code The response code of the executed command is stored. Response Data Response data Response data The response data of the executed command is stored. EtherCAT Connection 54 ZW-8000/7000/5000 User’s Manual for Communications Settings

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Note • The results of processing execution by parallel I/O also are reflected in the status signals. • The table below shows the combinations of bank numbers and BANKOUTx_A to E. (BANK9 to 32 are used only in the judgment value mode. In the normal mode, BANKOUTx_D to E are OFF at all times.) Bank number BANKOUTx_A BANKOUTx_B BANKOUTx_C BANKOUTx_D BANKOUTx_E BANK1 OFF OFF OFF OFF OFF BANK2 ON OFF OFF OFF OFF BANK3 OFF ON OFF OFF OFF BANK4 ON ON OFF OFF OFF BANK5 OFF OFF ON OFF OFF BANK6 ON OFF ON OFF OFF BANK7 OFF ON ON OFF OFF BANK8 ON ON ON OFF OFF BANK9 OFF OFF OFF ON OFF BANK10 ON OFF OFF ON OFF BANK11 OFF ON OFF ON OFF BANK12 ON ON OFF ON OFF BANK13 OFF OFF ON ON OFF BANK14 ON OFF ON ON OFF BANK15 OFF ON ON ON OFF BANK16 ON ON ON ON OFF BANK17 OFF OFF OFF OFF ON BANK18 ON OFF OFF OFF ON BANK19 OFF ON OFF OFF ON BANK20 ON ON OFF OFF ON BANK21 OFF OFF ON OFF ON BANK22 ON OFF ON OFF ON BANK23 OFF ON ON OFF ON BANK24 ON ON ON OFF ON BANK25 OFF OFF OFF ON ON BANK26 ON OFF OFF ON ON BANK27 OFF ON OFF ON ON BANK28 ON ON OFF ON ON BANK29 OFF OFF ON ON ON BANK30 ON OFF ON ON ON BANK31 OFF ON ON ON ON BANK32 ON ON ON ON ON 55

● I/O ports of output area Displacement sensor (slave) → Controller (master) I/O port name Signal Signal name Size of output data Function Output Data1 Output Data1 OUT1 data 4 bytes The Measurement result of OUT1 is output. Output Data2 Output Data2 OUT2 data 4 bytes The Measurement result of OUT2 is output. Output Data3 Output Data3 OUT3 data 4 bytes The Measurement result of OUT3 is output. Output Data4 Output Data4 OUT4 data 4 bytes The Measurement result of OUT4 is output. ● I/O ports of sysmac error status area Displacement sensor (slave) → Controller (master) The Sysmac error status is mapped only when the connection destination is the NX/NJ series. I/O port name Signal Signal name Function

Sysmac Error Status Sysmac Error Status Sysmac error status Indicates the Sysmac error status.

Observation Observation Monitor error Turns ON when a monitor error occurs on the displacement sensor. Minor Fault Minor Fault Light fault level error Turns ON when a light fault level error occurs on the displacement sensor. EtherCAT Connection 56 ZW-8000/7000/5000 User’s Manual for Communications Settings

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Assigning Device Variables to I/O Ports (PDO Mapping) When connected to an NX/NJ-series CPU Unit, the data for PDO communications in the Vision Sensor is displayed with I/O port names on the Sysmac Studio. You can assign device variables to the I/O ports in the Sysmac Studio I/O map to perform programming and monitoring. ▶ Multi View Explore (Connected to NX/NJ-series CPU Unit): [Configurations and Setup] | [I/O Map] (Double-click) Right-click a slave or I/O port in the I/O map and select [Create Device Variable]. The device variable name is automatically created as a combination of the device name and the I/O port name. You can also select an I/O port and enter a variable name in the [Variable] column. You can also select a registered variable from the variable table to use as a device variable. Refer to the Sysmac Studio Version 1 Operation Manual (Cat. No. W504) for details on registering device variables. 57

When the connection destination is a CJ series PLC This section describes the respective area assignments of the instruction area, response area and output area. ● Instruction area PLC (master) → Displacement sensor (slave) Top channel Bit Description 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 +0 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved SYNC EXE Sensor Head +1 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved ERCLR Control signal1 (32bit) +2 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved LIGHT OFF RESET TIMING Sensor Head Control +3 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved ZERO- CLR_T4 ZERO- CLR_T3 ZERO- CLR_T2 ZERO- CLR_T1 signal2 (32bit) ZERO_ T4 ZERO_ T3 ZERO_ T2 ZERO_ T1 +4 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Data +5 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved (parameter) (32bit) +6 Command code Command +7code (32bit) +8 Parameter 1 Data (parameter1) (16bit) +9 Parameter 2 Data (parameter2) (16bit) +10 Parameter 3 Data +11 (parameter3) (32bit) Signal Signal name Function EXE Control command execution Turns ON when the user (PLC) instructs execution of control commands to the displacement sensor. (Turns ON after the control command code and parameters are set.) Is returned to OFF on condition (input condition) that the user (PLC) turns the control command completion signal (FLG signal) from the displacement sensor ON. SYNC* Measurement synchronous start Turns ON when the user (Controller) instructs measurement synchronization to the displacement sensor. Is returned to OFF on condition (input condition) that the user (Controller) turns the measurement synchronization completion signal (SYNCFLG signal) ON. ERCLR Error clear Turns ON when the displacement sensor error signal (ERR signal) turns OFF. Is returned to OFF on condition (input condition) that the user (PLC) turns the error signal (ERR signal) OFF. TIMING Timing Turns ON when the user (PLC) instructs start of hold sampling to the displacement sensor. Turns OFF when the user (PLC) instructs end of hold sampling to the displacement sensor. RESET Reset Turns ON when the user (PLC) instructs judgment processing and output reset to the displacement sensor. If the hold function is used, the state in effect before the hold function was set will be restored. Turns OFF when the user (PLC) ends judgment processing and output reset to the displacement sensor. EtherCAT Connection 58 ZW-8000/7000/5000 User’s Manual for Communications Settings

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Signal Signal name Function LIGHTOFF Light metering OFF Turns ON when the user (PLC) instructs logical beam OFF to the displacement sensor. Turns OFF when the user (PLC) instructs logical beam ON to the displacement sensor. ZERO_T1 to 4 Zero reset execution Turns ON when the user (PLC) instructs execution of zero reset of TASK1 to 4 to the displacement sensor. Is returned to OFF on condition (input condition) that the user (PLC) turns the zero reset completion signal (ZEROSTAT signal) from the displacement sensor ON. ZEROCLR_T1 to 4 Zero reset cancel Turns ON when the user (PLC) instructs zero reset cancel of TASK1 to 4 to the displacement sensor. Is returned to OFF on condition (input condition) that the user (PLC) turns the zero reset completion signal (ZEROSTAT signal) from the displacement sensor OFF. Command code Command code Stores the command code. Parameter 1-3 Command parameter Stores the command parameter. * SYNC signal's area is disabled in External synchronous measurement mode. Note • In the FUNC mode, control signals other than ERCLR and LIGHTOFF cannot be executed. • Multiple control signals cannot be executed in the same cycle. Note, however, that when zero reset execution/ cancellation are performed simultaneously on multiple tasks, ZERO_T1 to 4 and ZEROCLR_T1 to 4 can be executed in the same cycle. • When the status of control signals differs from that of the input status of parallel I/O, processing is executed of one of the statuses is ON. • TRIG input signal, which is newly added to the ZW-8000/7000/5000 can be controlled from I/O signals. The input from PDO map is not possible. ● Response area Displacement sensor (slave) → PLC (master) Top channel Bit Description 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 +0 BANK1 _E BANK1 BANK1 BANK1 FLG Sensor _D _C _B Head Status signal1 Reserved BANK1 _A Reserved Reserved Reserved Reserved Reserved Reserved RUN SEQUEN CE READY SYNC FLG +1 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved ERR +2 Reserved Reserved Reserved Reserved TASKST AT_T4 TASKST TASKST TASKST HOLD Sensor AT_T3 AT_T2 AT_T1 STAT Head Status signal2 (32bit) Reserved OR GATE ENABLE STABI LITY LIGHT RESET STAT +3 LOW_ T4 PASS_ T4 HIGH_ T4 LOW_ T3 PASS_ T3 HIGH_ T3 LOW_ T2 PASS_ T2 HIGH_ T2 LOW_ T1 PASS_ T1 HIGH_ T1 ZERO STAT_T4 ZERO STAT_T3 ZERO STAT_T2 ZERO STAT_T1 +4 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Data +5 Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved (parameter) (32bit) +6 Command code Response +7code (32bit) +8 Response code Response +9 data (32bit) +10 Response data +11 59

Signal Signal name Function FLG Control command completion Turns ON when the displacement sensor completes control command execution. (Turns ON after the control command code, response code and response status are stored.) Automatically turns OFF if the control command execution signal (EXE signal) from the user (PLC) turns OFF.

SYNCFLG* Measurement synchronization completion Turns ON when the displacement sensor executes measurement synchronization processing and the state changes to one where normal measured values can be output. Automatically turns OFF if the measurement synchronization signal (SYNC signal) from the user (Controller) turns OFF.

READY Ready Turns OFF when the displacement sensor cannot execute control commands or measurement synchronization processing. Turns ON when the displacement sensor can execute control commands or measurement synchronization processing.

SEQUENCE Measurement execution status Turns ON from OFF or OFF from ON when the measurement results from sync0 of EtherCAT are reflected in the PDO data of EtherCAT while in PDO synchronized mode.

RUN Run screen Turns ON when the displacement sensor is in the RUN mode. Turns OFF when the displacement sensor is in the FUNC mode. ERR Error Turns ON when a displacement sensor error is detected. Turns OFF when the displacement sensor is normal. After it turns ON, it never turns OFF until the error clear signal (ERCLR signal) from the user (Controller) turns ON. BANKOUT_A to E Current bank number This outputs the currently specified bank number. It expresses the bank number in combinations of BANKOUTx_A to E. (For details of combinations, see Reference.) HOLDSTAT Hold execution status Turns ON when the displacement sensor is in the hold sampling period. Turns OFF when the displacement sensor is outside the hold sampling period. RESETSTAT Reset execution state Turns ON when the displacement sensor is in the reset execution state. Turns OFF when the displacement sensor is in the reset non-execution state. LIGHT Logical beam lighting state Turns ON when the logical beam is lit. Turns OFF when the logical beam is out. STABILITY Measurement position Turns ON when the measured value is in the measuring range. Turns OFF when the measured value is outside the measuring range. ENABLE Measurement state Turns ON when the displacement sensor is ready for measurement. Turns OFF when the displacement sensor cannot measure (excessive or insufficient received light, outside measuring range, Calibration ROM not mounted, during FUNC mode non-measurement). GATE Data output completed Turns ON when the displacement sensor completes control data output when hold is set. The displacement sensor automatically turns OFF one Gate period after turning ON. OR Overall judgment result Turns ON when even one of the judgment result of the displacement sensor TASK1 to 4 is other than PASS. Turns OFF when all of the judgment result of the displacement sensor TASK1 to 4 is PASS. HIGH_T1-4 HIGH output Turns ON when the judgment result of the displacement sensor TASK1 to 4 is HIGH (HIGH threshold < measured value). Turns OFF when the judgment result of the displacement sensor TASK1 to 4 is other than HIGH. EtherCAT Connection 60 ZW-8000/7000/5000 User’s Manual for Communications Settings

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Signal Signal name Function PASS_T1-4 PASS Output Turns ON when the judgment result of the displacement sensor TASK1 to 4 is PASS (LOW threshold ≤ measured value ≤ HIGH threshold). Turns OFF when the judgment result of the displacement sensor TASK1 to 4 is other than PASS. LOW_T1-4 LOW output Turns ON when the judgment result of the displacement sensor TASK1 to 4 is LOW (LOW threshold > measured value). Turns OFF when the judgment result of the displacement sensor TASK1 to 4 is other than LOW. ZEROSTAT_T1-4 Zero reset state Turns ON when the displacement sensor TASK1 to 4 is in the zero reset execution state. Turns OFF when the displacement sensor TASK1 to 4 is in the zero reset non- execution state. TASKSTAT_T1-4 TASK status Turns ON when the measurement data is finalized for each TASK. Command code Command code The executed command code is returned. Response code Response code The response code of the executed command is stored. Response data Response data The response data of the executed command is stored. * SYNC signal's area is disabled in External synchronous measurement mode. 61

Note • The results of processing execution by parallel I/O also are reflected in the status signals. • The table below shows the combinations of bank numbers and BANKOUTx_A to E. (BANK9 to 32 are used only in the judgment value mode. In the normal mode, BANKOUTx_D to E are OFF at all times.) Bank number BANKOUTx_A BANKOUTx_B BANKOUTx_C BANKOUTx_D BANKOUTx_E BANK1 OFF OFF OFF OFF OFF BANK2 ON OFF OFF OFF OFF BANK3 OFF ON OFF OFF OFF BANK4 ON ON OFF OFF OFF BANK5 OFF OFF ON OFF OFF BANK6 ON OFF ON OFF OFF BANK7 OFF ON ON OFF OFF BANK8 ON ON ON OFF OFF BANK9 OFF OFF OFF ON OFF BANK10 ON OFF OFF ON OFF BANK11 OFF ON OFF ON OFF BANK12 ON ON OFF ON OFF BANK13 OFF OFF ON ON OFF BANK14 ON OFF ON ON OFF BANK15 OFF ON ON ON OFF BANK16 ON ON ON ON OFF BANK17 OFF OFF OFF OFF ON BANK18 ON OFF OFF OFF ON BANK19 OFF ON OFF OFF ON BANK20 ON ON OFF OFF ON BANK21 OFF OFF ON OFF ON BANK22 ON OFF ON OFF ON BANK23 OFF ON ON OFF ON BANK24 ON ON ON OFF ON BANK25 OFF OFF OFF ON ON BANK26 ON OFF OFF ON ON BANK27 OFF ON OFF ON ON BANK28 ON ON OFF ON ON BANK29 OFF OFF ON ON ON BANK30 ON OFF ON ON ON BANK31 OFF ON ON ON ON BANK32 ON ON ON ON ON EtherCAT Connection 62 ZW-8000/7000/5000 User’s Manual for Communications Settings

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings ● Output area Displacement sensor (slave) → PLC (master) 63 Top channel Bit Description 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0

+0 Output Data 1 Output data 0 (32bit) +1+2 Output Data 2 Output data 1 (32bit) +3+4 Output Data 3 Output data 2 (32bit) +5+6 Output Data 4 Output data 3 (32bit) +7 Signal Signal name Function Output Data1 OUT1 data The Measurement result of OUT1 is output. Output Data2 OUT2 data The Measurement result of OUT2 is output. Output Data3 OUT3 data The Measurement result of OUT3 is output. Output Data4 OUT4 data The Measurement result of OUT4 is output. Note For assigning of OUT1 to OUT4, refer to the following: Refer to Displacement Sensor ZW-8000/7000/5000 series Confocal Fiber Type Displacement Sen- sor User's Manual (Z362) "4-5 I/O Settings". I/O Memory Assignment Method (PDO Mapping) If you connect the Displacement Sensor to a CJ-series PLC, the OMRON CJ1W-NC@82 Position Control Unit is used as the EtherCAT master. This section describes the assignments in the I/O memory of the PLC for the Command, Response, and Data Output Areas for the Vision Sensor. The areas for the Vision Sensor correspond to the areas for the Position Control Unit as shown in the following table. Vision Sensor area Position Control Unit area Maximum number of words Command area Remote I/O Output Memory Area 12 Response area Remote I/O Input Memory Area 12 Output area Remote I/O Input Memory Area 8 The I/O memory assignment method is described below. 1. Network Settings Double-click [I/O Table and Unit Setup] in the CX-Programmer, right-click CJ1W-NC@82, and select [Edit SIO Unit Parameters]. 2. Setting Common Parameters The Support Software for Position Control Units will start. Set the areas and the first words for the Remote I/O Output Memory Area, the Axis Status Memory Area, and the Remote I/O Input Memory Area. 3. Checking the Remote I/O Area Select [Network] and then click the [Remote I/O Assignment] Tab to check the I/O addresses that are set for remote I/O. (You can manually change the input offset and output offset.) In the following example, CIO 3800 is set as the first word of the remote I/O output area and CIO 3900 is set as the first word of the remote I/O input area. EtherCAT Connection 64 ZW-8000/7000/5000 User’s Manual for Communications Settings

First address in the response and data output areas of the ZW First address in the command areas of the ZW

EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings In the case in the figure above, the memory map will be as follows. Position Control Unit to ZW CIO3800 CIO3811 Refer to the CJ-series Position Control Units Operation Manual (Cat. No. W487) for details on I/O memory assignment methods. If you connect more than one ZW Sensor to an OMRON Position Control Unit, the following addresses in the memory map are assigned in order for the I/O areas. Set the node address setting switches on the Sensors to 0 to automatically set up the network. Node addresses 17 and higher will be automatically set for the remote I/O. For the Position Control Unit, the areas are set only for node 17 (which has the first area for each of the three memory areas). To access data from another node from a ladder program, add the correct offset from the first word of the first area for node 17 and access the resulting address. ZW to Position Control Unit CIO3900 Node 17 ZW command area (12 words) CIO3911 CIO3812 CIO3912 CIO3823 CIO3919 CIO3920 Node 17 ZW response area (12 words) Node 18 ZW command area (12 words) Node 17 ZW data output area (8 words) CIO3931 CIO3932 CIO3939 Node 18 ZW command area (12 words) Node 18 ZW data output area (8 words) 65

Command List This list explains each of the commands used by EtherCAT. ● Utility commands

Command area Top channel (Hex) ● Bank control command Command name Function Reference (Pages) ● Data acquisition/setting commands +7 +6 0010 3011 Data save Saves the current system data and bank data to the main unit. p.67

0010 E000 Sensor Head calibration Calibrate the Sensor Head. p.68 0010 F010 Restart Restarts the displacement sensor. p.68

Command area Top channel (Hex) Command name Function Reference (Pages) +7 +6 0030 8000 Current bank settings Replace the current bank number by the specified bank number. p.69 Command area Top channel (Hex) Command name Function Reference (Pages) +7 +6 0040 1000 Processing unit data acquisition Acquires the measurement data and setting data of the processing unit. p.71 0050 1000 Processing unit data setting Change the setting data of the processing unit. p.72

0040 4000 System data acquisition Acquires the system data. p.73 0050 4000 System data settings Sets the system data. p.74 EtherCAT Connection 66 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Command details ● Data save (command code: 3011 0010) Command (Controller → displacement sensor) Command area Top channel Response (Controller ← displacement sensor) Bit Description 15-12 11-8 7-4 3-0 +6 0011 0000 0001 0001 Command code (32-bit) +7 0000 0000 0001 0000 Response area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 0011 0000 0001 0001 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0001 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) 67 ● Sensor head calibration (command code: E000 0010) Command (Controller → displacement sensor) Command area Top channel Response (Controller ← displacement sensor) ● Restart (command code: F010 0010) Command (Controller → displacement sensor) Response (Controller ← displacement sensor) Bit Description 15-12 11-8 7-4 3-0 +6 1110 0000 0000 0000 Command code (32-bit) +7 0000 0000 0001 0000 Response area top channel Bit Description 15-12 11-8 7-4 3-0 +6 1110 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0001 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) Command area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 1111 0000 0001 0000 Command code (32-bit) +7 0000 0000 0001 0000 Response area Top channel Bit Description 15-12 11-8 7-4 3-0 There is no response since the Controller is restarted. EtherCAT Connection 68 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings ● Current bank setting (command code: 8000 0030) Command (Controller → displacement sensor) Command area Bit Description Top channel 15-12 11-8 7-4 3-0 +6 1000 0000 0000 0000 Command code (32-bit) +7 0000 0000 0011 0000 +8 0000 0000 0000 0000 Bank number (16-bit: value obtained by subtracting 1 from bank number) Response (Controller ← displacement sensor) Response area Top channel Note This is set to 0 when bank 1 is switched to. Bit Description 15-12 11-8 7-4 3-0 +6 1000 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0011 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) 69 Response (Controller ← displacement sensor) Response area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 1000 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0011 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) EtherCAT Connection 70 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings ● Processing unit data acquisition (command code: 1000 0040) Command (Controller → displacement sensor) Command area Top channel Response (Controller ← displacement sensor) Bit Description 15-12 11-8 7-4 3-0 +6 0001 0000 0000 0000 Command code (32-bit) +7 0000 0000 0100 0000 +8 0000 0000 0000 0000 Unit number (16-bit) 8-1 Processing Item Data List p.202 +9 0000 0000 0000 0000 Data number (16-bit) 8-1 Processing Item Data List p.202 Response area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 0001 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0100 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +10 0000 0000 0000 0000 Response data (32-bit) Acquired data +11 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) 71 ● Processing unit data setting (command code: 1000 0050) Command (Controller → displacement sensor) Command area Top channel Response (Controller ← displacement sensor) Bit Description 15-12 11-8 7-4 3-0 +6 0001 0000 0000 0000 Command code (32-bit) +7 0000 0000 0101 0000 +8 0000 0000 0000 0000 Unit number (16-bit) 8-1 Processing Item Data List p.202 +9 0000 0000 0000 0000 Data number (16-bit) 8-1 Processing Item Data List p.202 +10 0000 0000 0000 0000 Setting data (UDINT) +11 0000 0000 0000 0000 Response area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 0001 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0101 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) EtherCAT Connection 72 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings ● System data acquisition (command code: 4000 0040) Command (Controller → displacement sensor) Command area Top channel Response (Controller ← displacement sensor) Bit Description 15-12 11-8 7-4 3-0 +6 0100 0000 0000 0000 Command code (32-bit) +7 0000 0000 0100 0000 +8 0000 0000 0000 0000 See data number (16-bit). 8-2 System data list p.212 Response area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 0100 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0100 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +10 0000 0000 0000 0000 Response data (32-bit) Acquired data +11 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) 73 ● System data setting (command code: 4000 0050) Command (Controller → displacement sensor) Command area Top channel Response (Controller ← displacement sensor) Bit Description 15-12 11-8 7-4 3-0 +6 0100 0000 0000 0000 Command code (32-bit) +7 0000 0000 0101 0000 +8 0000 0000 0000 0000 Data number (16-bit) 8-2 System data list p.212 +9 0000 0000 0000 0000 Fixed at “0” +10 0000 0000 0000 0000 Setting data (32-bit) +11 0000 0000 0000 0000 Response area Top channel Bit Description 15-12 11-8 7-4 3-0 +6 0100 0000 0000 0000 Command code (32-bit) Stores the command code targeted for a +7 0000 0000 0101 0000 response. +8 0000 0000 0000 0000 Response code (32-bit) Command execution result OK +9 0000 0000 0000 0000 +8 0000 0000 0000 0001 Response code (32-bit) Command execution result NG (no +9 1111 1111 1111 1111 corresponding command) +8 0000 0000 0000 0010 Response code (32-bit) Command execution result NG (wrong +9 1111 1111 1111 1111 parameter) +8 0000 0000 0000 0100 Response code (32-bit) Command execution result NG +9 1111 1111 1111 1111 (processing execution error) +8 0000 0000 0000 1000 Response code (32-bit) Command execution result NG (mode +9 1111 1111 1111 1111 error) EtherCAT Connection 74 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Timing Chart (EtherCAT) ● Basic operation of PDO synchronized mode Interrupted process from Sync0 Sensor Controller Displacement Sensor 1 Exposure timing Displacement Sensor 2 Displacement Output area Sensor 1 Updating timing Displacement Sensor 2 Displacement Sensor 1 SEQUENCE output Response area Displacement Sensor 2 SEQUENCE output (1) (2)(3) (4) (5) (6) (1) Controller sends the interrupted process of Sync0. (2) All of the Displacement Sensors which receives the signal of step 1 start to measure in synchronization with the Exposure end timing. (3) When the Displacement Sensor receives the next interrupted process of Sync0, turns the SEQUENCE output ON from OFF. (4) When the Displacement Sensor receives the interrupted process of Sync0 which is immediately after the completion of the measurement process, all of the Displacement Sensor start to the next measurement. At that time, SEQUENCE output has held ON. (5) When updates the measurement result of the step 2. the Displacement Sensor turns the SEQUENCE output OFF from ON. (6) When all of the Displacement Sensors start the measurement when receive the interrupted process of Sync0 while the SEQUENCE output has held OFF, turns SEQUENCE output ON from OFF at the received timing of the next interrupted process of Sync0. 75 When the ON/OFF switching timing of the SEQUENCE output differs between Displacement Sensor 1 and Displacement Sensor 2, synchronization may be deviating, so turn the SYNC input to ON from OFF and execute synchronous measurement. (1) The Controller changes the state of the SYNC input signal from OFF to ON. (2) Synchronization of the displacement sensor ends. (3) The Controller makes sure that the SYNCFLG output signal has turned ON, and then changes the state of the SYNC input signal from ON to OFF. (4)The Displacement Sensor makes sure that the SYNC input signal has turned OFF, and then automatically changes the state of the SYNCFLG output signal to OFF. (5) The rising edge and falling edge of the SEQUENCE signal of the Displacement Sensor are synchronized. • Set the all of the Displacement Sensor's Measurement cycle to same. • When the Synchronization of the Exposure start timing is necessary, set the Exposure mode to Manual. • The delay of the PDO communication cycle when from the Displacement Sensor starts the measurement after receiving of the interrupted process of Sync0 until sends the measurement result to output area is the following: The cycle is while SEQUENCE output is turned ON + 1 cycle When you need the synchronization with a data which except the Displacement Sensor slave output, refer to this values. • If PDO communication is not started while all Displacement Sensors are set the same and measurement is possible, synchronization may deviate (the SEQUENCE signal ON/OFF switching timings differ). In this case, the Controller needs to turn the SYNC input signal from OFF to ON to OFF and execute synchronous measurement. In PDO synchronized mode, even if the SYNC input signal is turned to ON from OFF< the TASKSTAT signal does not turn OFF. • A synchronous delay may be occurred during run mode depending on the combination of the PDO communication cycle and the measurement cycle of the Displacement Sensor. To avoid these delay, consider 2 cycles of the PDO communication and measurement by referring the below table. Additionally, we recommend that you to check all of the Displacement Sensors are set the SEQUENCE output timing to same. ON Command SYNC input area OFFDisplacement Sensor 1 SYNCFLG output ON OFFDisplacement Sensor 2 ON SYNCFLGE output OFFResponse area Displacement Sensor 1 ON SEQUENCE output OFF Displacement Sensor 2 SEQUENCE output ON OFF Important (1) (2) (3) (4) (5) EtherCAT Connection 76 ZW-8000/7000/5000 User’s Manual for Communications Settings EtherCAT Connection ZW-8000/7000/5000 User’s Manual for Communications Settings Note Refer to the following information for measurement cycles without occurrences of synchronization deviation. ■ ZW-7000@/5000@ Cycle PDO communication cycle (us) delay of the PDO 125 250 500 750 1000 1250 1500 1750 communi- cation 2 cycle 35 or shorter 160 or 410 or shorter 660 or shorter shorter • Descried as − means a condition which any measurement cycle delays do not occur. • There is no condition which the PDO communication cycle delay until the output area is updated becomes 1 cycle. 910 or shorter 1160 or shorter 1410 or shorter 1660 or shorter 3 cycle 85 to 160 210 to 410 460 to 910 710 to 1410 960 to 1600 1210 to 1600 1460 to 1600 − 4 cycle 210 to 285 460 to 660 960 to 1410 1460 to 1600 − − − − 5 cycle 335 to 410 710 to 910 1460 to 1600 − − − − − 6 cycle 460 to 535 960 to 1160 − − − − − − 7 cycle 585 to 660 1210 to 1410 − − − − − − 8 cycle 710 to 785 1460 to 1600 − − − − − − 9 cycle 835 to 910 − − − − − − − 10 cycle 960 to 1035 − − − − − − − 11 cycle 1085 to 1160 − − − − − − − 12 cycle 1210 to 1285 − − − − − − − 13 cycle 1335 to 1410 14 cycle 1460 to 1535 − − − − − − − 15 cycle 1585 to 1660 − − − − − − − 77 Note Refer to the following information for measurement cycles without occurrences of synchronization deviation. ■ ZW-8000@ Cycle PDO communication cycle (μs) delay of the PDO 125 250 500 750 1000 1250 1500 1750 communi- cation 2 cycle × 60 310 or 560 or shorter shorter • X indicates no condition • With ZW-8000@, the following formulas can be used to calculate measurement cycles without occurrences of synchronization deviation when the PDO communication cycle delay is 16 cycles or more. Measurement cycle lower limit [μs] = PDO communication cycle × (PDO cycle delay - 1) - 90 Measurement value upper limit [μs] = PDO communication cycle × PDO cycle delay - 190 • There is no condition which the PDO communication cycle delay until the output area is updated becomes 1 cycle. 810 or shorter 1060 or shorter 1310 or shorter 1560 or shorter 3 cycle 60 160 to 310 410 to 810 660 to 1310 910 to 1810 1160 to 2310 1410 to 2810 1660 to 3310 4 cycle 160 to 185 410 to 560 910 to 1310 1410 to 2060 1910 to 2810 2410 to 3560 2910 to 4310 3410 to 5060 5 cycle 285 to 310 660 to 810 1410 to 1810 2160 to 2810 2910 to 3810 3660 to 4810 4410 to 5810 5160 to 6810 6 cycle 410 to 435 910 to 1060 1910 to 2310 2910 to 3560 3910 to 4810 4910 to 6060 5910 to 7310 6910 to 7500 7 cycle 535 to 560 1160 to 1310 2410 to 2810 3660 to 4310 4910 to 5810 6160 to 7310 7410 to 7500 − 8 cycle 660 to 685 1410 to 1560 2910 to 3310 4410 to 5060 5910 to 6810 7410 to 7500 − − 9 cycle 785 to 810 1660 to 1810 3410 to 3810 5160 to 5810 6910 to 7500 − − − 10 cycle 910 to 935 1910 to 2060 3910 to 4310 5910 to 6560 − − − − 11 cycle 1035 to 1060 2160 to 2310 4410 to 4810 6660 to 7310 − − − − 12 cycle 1160 to 1185 2410 to 2560 4910 to 5310 7410 to 7500 ɻ ɻ − − 13 cycle 1285 to 1310 2660 to 2810 5410 to 5810 ɻ ɻ ɻ − − 14 cycle 1410 to1435 2910 to 3060 5910 to 6310 ɻ ɻ ɻ − − 15 cycle 1535 to1560 3160 to 3310 6410 to 6810 ɻ ɻ ɻ − − EtherCAT Connection 78 ZW-8000/7000/5000 User’s Manual for Communications Settings


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